Optical microactuation in piezoceramics

Sarita Thakoor, Patcharin Poosanaas, John M. Morookian, Andre Yavrouian, Lynn Lowry, Neville I. Marzwell, Jeffrey G. Nelson, Ratnakar R. Neurgaonkar, Kenji Uchino

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

Optically/electrically operable flexible film microactuators that can offer up to two orders high efficiency of photonic to mechanical conversion compared to ceramic actuators are conceptualized. A polarized ceramic wafer of non- centrosymmetric perovskite ferroelectric ABO3 compounds, such as lead lanthanum zirconate titanate (PLZT), when exposed to an illumination (approximately 350 to 400 nm wavelength) close to the bandgap energy, can generate a large photovoltage (approximately 1.0 kV/mm) across its length, and by the inverse piezoelectric effect cause the piezoceramic wafer to deflect in the direction away from the illumination. The optical actuation effect in piezoceramic wafers is investigated as a function of thickness, composition, and surface roughness. Such flexible microactuators would enable a new generation of micro- electro-mechanical and micro-opto-mechanical systems where the actuation will not be restricted by the clamping effect due to the rigid substrate as in the current silicon based micromachined structures. To deposit the piezoceramic film directly onto a flexible substrate, the substrate must have high temperature stability, high strength (Young's Modulus approximately 4.9 X 1010 N/m2), a close match of thermal coefficients of expansion with the piezoceramic film, and a tailorable crystal orientation in order to provide a desired template for growth of oriented PLZT. This paper also presents a comparison of a variety of flexible substrate films and fibers and our recent results on polybenzoxazole (PBO), a polymeric candidate for a flexible high temperature substrate. Variation of the properties of PBO as a function of temperature are also presented.

Original languageEnglish (US)
Pages (from-to)374-391
Number of pages18
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3328
DOIs
StatePublished - Dec 1 1998
EventSmart Structures and Materials 1998: Smart Electronics and MEMS - San Diego, CA, United States
Duration: Mar 2 1998Mar 2 1998

Fingerprint

Piezoceramics
Wafer
Microactuator
Flexible Substrate
Substrate
Substrates
Microactuators
wafers
Illumination
actuation
Perovskite
Coefficient of Thermal Expansion
roughness
Lighting
illumination
ceramics
Young's Modulus
Lanthanum
Surface Roughness
Photonics

All Science Journal Classification (ASJC) codes

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Thakoor, S., Poosanaas, P., Morookian, J. M., Yavrouian, A., Lowry, L., Marzwell, N. I., ... Uchino, K. (1998). Optical microactuation in piezoceramics. Proceedings of SPIE - The International Society for Optical Engineering, 3328, 374-391. https://doi.org/10.1117/12.320191
Thakoor, Sarita ; Poosanaas, Patcharin ; Morookian, John M. ; Yavrouian, Andre ; Lowry, Lynn ; Marzwell, Neville I. ; Nelson, Jeffrey G. ; Neurgaonkar, Ratnakar R. ; Uchino, Kenji. / Optical microactuation in piezoceramics. In: Proceedings of SPIE - The International Society for Optical Engineering. 1998 ; Vol. 3328. pp. 374-391.
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Thakoor, S, Poosanaas, P, Morookian, JM, Yavrouian, A, Lowry, L, Marzwell, NI, Nelson, JG, Neurgaonkar, RR & Uchino, K 1998, 'Optical microactuation in piezoceramics', Proceedings of SPIE - The International Society for Optical Engineering, vol. 3328, pp. 374-391. https://doi.org/10.1117/12.320191

Optical microactuation in piezoceramics. / Thakoor, Sarita; Poosanaas, Patcharin; Morookian, John M.; Yavrouian, Andre; Lowry, Lynn; Marzwell, Neville I.; Nelson, Jeffrey G.; Neurgaonkar, Ratnakar R.; Uchino, Kenji.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3328, 01.12.1998, p. 374-391.

Research output: Contribution to journalConference article

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T1 - Optical microactuation in piezoceramics

AU - Thakoor, Sarita

AU - Poosanaas, Patcharin

AU - Morookian, John M.

AU - Yavrouian, Andre

AU - Lowry, Lynn

AU - Marzwell, Neville I.

AU - Nelson, Jeffrey G.

AU - Neurgaonkar, Ratnakar R.

AU - Uchino, Kenji

PY - 1998/12/1

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N2 - Optically/electrically operable flexible film microactuators that can offer up to two orders high efficiency of photonic to mechanical conversion compared to ceramic actuators are conceptualized. A polarized ceramic wafer of non- centrosymmetric perovskite ferroelectric ABO3 compounds, such as lead lanthanum zirconate titanate (PLZT), when exposed to an illumination (approximately 350 to 400 nm wavelength) close to the bandgap energy, can generate a large photovoltage (approximately 1.0 kV/mm) across its length, and by the inverse piezoelectric effect cause the piezoceramic wafer to deflect in the direction away from the illumination. The optical actuation effect in piezoceramic wafers is investigated as a function of thickness, composition, and surface roughness. Such flexible microactuators would enable a new generation of micro- electro-mechanical and micro-opto-mechanical systems where the actuation will not be restricted by the clamping effect due to the rigid substrate as in the current silicon based micromachined structures. To deposit the piezoceramic film directly onto a flexible substrate, the substrate must have high temperature stability, high strength (Young's Modulus approximately 4.9 X 1010 N/m2), a close match of thermal coefficients of expansion with the piezoceramic film, and a tailorable crystal orientation in order to provide a desired template for growth of oriented PLZT. This paper also presents a comparison of a variety of flexible substrate films and fibers and our recent results on polybenzoxazole (PBO), a polymeric candidate for a flexible high temperature substrate. Variation of the properties of PBO as a function of temperature are also presented.

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Thakoor S, Poosanaas P, Morookian JM, Yavrouian A, Lowry L, Marzwell NI et al. Optical microactuation in piezoceramics. Proceedings of SPIE - The International Society for Optical Engineering. 1998 Dec 1;3328:374-391. https://doi.org/10.1117/12.320191