Optimization of PbTiO3 seed layers and Pt metallization for PZT-based piezoMEMS actuators

Luz M. Sanchez, Daniel M. Potrepka, Glen R. Fox, Ichiro Takeuchi, Ke Wang, Leonid A. Bendersky, Ronald G. Polcawich

Research output: Contribution to journalArticlepeer-review

46 Scopus citations

Abstract

This work attempts to optimize past research results on lead zirconate titanate (PZT) using the fabrication processes at the U.S. Army Research Laboratory so as to achieve a high degree of {001} texture and improved piezoelectric properties. A comparative study was performed between Ti/Pt and TiO2/Pt bottom electrodes. The results indicate that the use of a highly oriented {100} rutile phase TiO2 led to highly textured {111} Pt which in turn improved both the PTO and PZT orientations. PZT (52/48) and (45/55) thin films with and without PTO seed layers were deposited and examined via x-ray diffraction (XRD) methods as a function of annealing temperature. The seed layer provides significant improvement in the {100} orientation generally, and in the {001} subset of planes specifically, while suppressing the {111} orientation of the PZT. Improvements in the Lotgering factor (f) were observed from an existing Ti/Pt/PZT process (f = 0.66) to samples using the PTO seed layer deposited onto the improved Pt electrodes, TiO2/Pt/PTO/PZT (f = 0.96).

Original languageEnglish (US)
Pages (from-to)1920-1931
Number of pages12
JournalJournal of Materials Research
Volume28
Issue number14
DOIs
StatePublished - Jul 28 2013

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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