Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors

Yoshikazu Hishinuma, Eui Hyeok Yang, Jian Gong Cheng, Susan E. Trolier-McKinstry

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).

Original languageEnglish (US)
Article numberIMECE2004-62070
Pages (from-to)299-304
Number of pages6
JournalAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
DOIs
StatePublished - 2004

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Microactuators
Membranes
Fabrication
Actuators
Silicon
Electrodes
Natural frequencies
Mathematical models
Bandwidth
Experiments

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

@article{0dd347f559074f85a3f791be1eafa7e7,
title = "Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors",
abstract = "This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).",
author = "Yoshikazu Hishinuma and Yang, {Eui Hyeok} and Cheng, {Jian Gong} and Trolier-McKinstry, {Susan E.}",
year = "2004",
doi = "10.1115/IMECE2004-62070",
language = "English (US)",
pages = "299--304",
journal = "American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS",
issn = "1096-665X",

}

TY - JOUR

T1 - Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors

AU - Hishinuma, Yoshikazu

AU - Yang, Eui Hyeok

AU - Cheng, Jian Gong

AU - Trolier-McKinstry, Susan E.

PY - 2004

Y1 - 2004

N2 - This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).

AB - This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).

UR - http://www.scopus.com/inward/record.url?scp=21644448142&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=21644448142&partnerID=8YFLogxK

U2 - 10.1115/IMECE2004-62070

DO - 10.1115/IMECE2004-62070

M3 - Article

SP - 299

EP - 304

JO - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

JF - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

SN - 1096-665X

M1 - IMECE2004-62070

ER -