Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors

Yoshikazu Hishinuma, Eui Hyeok Yang, Jian Gong Cheng, Susan Trolier-McKinstry

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).

Original languageEnglish (US)
Article numberIMECE2004-62070
Pages (from-to)299-304
Number of pages6
JournalAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
DOIs
StatePublished - Jan 1 2004
Event2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States
Duration: Nov 13 2004Nov 19 2004

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Microactuators
Membranes
Fabrication
Actuators
Silicon
Electrodes
Natural frequencies
Mathematical models
Bandwidth
Experiments

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

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title = "Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors",
abstract = "This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).",
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AU - Hishinuma, Yoshikazu

AU - Yang, Eui Hyeok

AU - Cheng, Jian Gong

AU - Trolier-McKinstry, Susan

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AB - This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).

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