Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors

Yoshikazu Hishinuma; Eui Hyeok Yang; Jian Gong Cheng; Susan Trolier-McKinstry

doi:10.1115/IMECE2004-62070

Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors

Yoshikazu Hishinuma, Eui Hyeok Yang, Jian Gong Cheng, Susan Trolier-McKinstry

Research output: Contribution to journal › Conference article › peer-review

8 Scopus citations

Abstract

This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).

Original language	English (US)
Article number	IMECE2004-62070
Pages (from-to)	299-304
Number of pages	6
Journal	American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
DOIs	https://doi.org/10.1115/IMECE2004-62070
State	Published - 2004
Event	2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States Duration: Nov 13 2004 → Nov 19 2004

All Science Journal Classification (ASJC) codes

Engineering(all)

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10.1115/IMECE2004-62070

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title = "Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors",

abstract = "This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).",

author = "Yoshikazu Hishinuma and Yang, {Eui Hyeok} and Cheng, {Jian Gong} and Susan Trolier-McKinstry",

year = "2004",

doi = "10.1115/IMECE2004-62070",

language = "English (US)",

pages = "299--304",

journal = "American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS",

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note = "2004 ASME International Mechanical Engineering Congress and Exposition, IMECE ; Conference date: 13-11-2004 Through 19-11-2004",

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Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors. / Hishinuma, Yoshikazu; Yang, Eui Hyeok; Cheng, Jian Gong et al.

In: American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS, 2004, p. 299-304.

Research output: Contribution to journal › Conference article › peer-review

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T1 - Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors

AU - Hishinuma, Yoshikazu

AU - Yang, Eui Hyeok

AU - Cheng, Jian Gong

AU - Trolier-McKinstry, Susan

PY - 2004

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AB - This paper describes an optimization of PZT unimorph membrane microactuators in view of their application to deformable mirrors (DMs). PZT unimorph actuators of various electrode designs, silicon membrane thickness, and membrane sizes were fabricated and characterized. A mathematical model was developed to further assist the optimization of membrane thickness and electrode sizes, and excellent agreement with experiment was obtained. For a 2.5mm diameter actuator with 2μm thick PZT and 15μm thick silicon membrane, the measured vertical stroke was 5.4μm at 50V. The measured resonant frequency of the unimorph actuator was 47kHz, far exceeding the bandwidth requirement of most DMs (∼1kHz).

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JO - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

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T2 - 2004 ASME International Mechanical Engineering Congress and Exposition, IMECE

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Optimized design, fabrication and characterization of PZT unimorph microactuators for deformable mirrors

Abstract

All Science Journal Classification (ASJC) codes

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