Oxidation Studies of Crystalline CVD Silicon Nitride

Honghua Du, Richard E. Tressler, Karl E. Spear, Carlo G. Pantano

Research output: Contribution to journalArticlepeer-review

195 Scopus citations

Fingerprint

Dive into the research topics of 'Oxidation Studies of Crystalline CVD Silicon Nitride'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds