Oxide thickness determination by XPS, AES, SIMS, RBS and TEM

J. R. Shallenberger, D. A. Cole, S. W. Novak, R. L. Moore, M. J. Edgell, S. P. Smith, C. J. Hitzman, J. F. Kirchhoff, E. Principe, S. Biswas, R. J. Bleiler, W. Nieveen, K. Jones

Research output: Chapter in Book/Report/Conference proceedingConference contribution

18 Scopus citations

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Engineering & Materials Science