The leakage characteristics and dielectric properties of Pt/(Ba,Sr)TiO 3/Pt thin-film capacitors were found to be remarkably sensitive to the postannealing temperature in oxygen and nitrogen atmosphere. High leakage currents and low-frequency dielectric relaxation were found in as-deposited capacitors after they had been postannealed in nitrogen at 550°C and subsequently annealed in oxygen at 350°C. Such results are related to the mobile oxygen ions and oxygen vacancies accumulated in the (Ba,Sr)TiO 3 films. The chemical process of the formation of charged oxygen ions during postannealing is proposed.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)