Particle coating in seeded dusty plasma reactor: Distribution of deposition rates

Research output: Contribution to journalArticlepeer-review

13 Scopus citations
Original languageEnglish (US)
Pages (from-to)2011-2017
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number5
DOIs
StatePublished - 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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