Parylene background fluorescence study for biomems applications

Bo Lu, Siyang Zheng, Yu Chong Tai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

Parylene is a commonly used material in Bio-MEMS field. Background fluorescence of parylene film itself can be a major obstacle for parylene-based devices used in fluorescent detection. We report here an in-depth study of the fluorescence mechanisms of parylene-C and parylene-HT films with fluorescent microscopy, fluorimeter, and infrared spectroscopy. Influences of fabrication process on background fluorescence of the devices are discussed. Solutions to reduce background fluorescence are provided and effectiveness is confirmed. Parylene-HT is found to be a more promising candidate for Bio-MEMS applications for fluorescence concern. The methods and results are valuable to other polymer materials in MEMS field.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages176-179
Number of pages4
DOIs
StatePublished - Dec 11 2009
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: Jun 21 2009Jun 25 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period6/21/096/25/09

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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