TY - GEN
T1 - Parylene C as a multifunctional insulator for all-organic flexible electronics
AU - Khawaji, Ibrahim H.
AU - Awadelkarim, Osama O.
AU - Lakhtakia, Akhlesh
N1 - Funding Information:
AL is grateful to the Charles Godfrey Binder Endowment at the Pennsylvania State University for ongoing support of his research activities.
Publisher Copyright:
© 2019 COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.
PY - 2019
Y1 - 2019
N2 - The use of a single material as a multifunctional insulator (i.e. substrate, gate dielectric, and passivation layer) in the same device will reduce cost and improve the sustainability of flexible integrated circuits. Towards that goal, use of the oblique-angle physicochemical deposition technique to fabricate columnar microfibrous thin films of Parylene C and thereby lower the relative permittivity motivated the examination of these materials as interlayer dielectrics in flexible electronics. The static Young's moduli, yield strengths, and relative permittivity of columnar microfibrous thin films of Parylene C were correlated to the porosity, crystallinity, and the deposition angle. The Poole-Frenkel conduction mechanism is responsible for the DC leakage current at temperatures not exceeding 100°C, and the AC leakage current is attributable to small-polaron tunneling mechanism. The leakage current after the application of a constant-voltage stress for a certain duration conforms to the Kohlrausch-Williams-Watts relaxation model, and the capacitance of a columnar microfibrous thin film will degrade by 20% in 10 years.
AB - The use of a single material as a multifunctional insulator (i.e. substrate, gate dielectric, and passivation layer) in the same device will reduce cost and improve the sustainability of flexible integrated circuits. Towards that goal, use of the oblique-angle physicochemical deposition technique to fabricate columnar microfibrous thin films of Parylene C and thereby lower the relative permittivity motivated the examination of these materials as interlayer dielectrics in flexible electronics. The static Young's moduli, yield strengths, and relative permittivity of columnar microfibrous thin films of Parylene C were correlated to the porosity, crystallinity, and the deposition angle. The Poole-Frenkel conduction mechanism is responsible for the DC leakage current at temperatures not exceeding 100°C, and the AC leakage current is attributable to small-polaron tunneling mechanism. The leakage current after the application of a constant-voltage stress for a certain duration conforms to the Kohlrausch-Williams-Watts relaxation model, and the capacitance of a columnar microfibrous thin film will degrade by 20% in 10 years.
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U2 - 10.1117/12.2513921
DO - 10.1117/12.2513921
M3 - Conference contribution
AN - SCOPUS:85068225299
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Behavior and Mechanics of Multifunctional Materials XIII
A2 - Naguib, Hani E.
PB - SPIE
T2 - Behavior and Mechanics of Multifunctional Materials XIII 2019
Y2 - 4 March 2019 through 6 March 2019
ER -