PEN/Si3N4 bilayer film for dc bus capacitors in power converters in hybrid electric vehicles

Chen Zou, Qiming Zhang, Shihai Zhang, Douglas Kushner, Xin Zhou, Richard Bernard, Raymond J. Orchard

    Research output: Contribution to journalArticle

    16 Scopus citations

    Abstract

    High performance hybrid bilayer capacitor film has been developed by controlled deposition of silicon nitride (Si3N4) on polyethylene naphthalate (PEN). It was found that silicon nitride prepared with plasma-enhanced chemical vapor deposition can significantly increase the dielectric constant (K) and energy density of PEN by more than 20% and 50%, respectively. Moreover, the PEN/Si3N4 bilayer hybrid film also exhibits appropriate mechanical and thermal properties for capacitor winding. The high operating temperature and energy density of the PEN/Si 3N4 bilayer dielectric film are very attractive for dc bus capacitors used in power inverters or converters found in hybrid electric vehicles, wind turbine generators, grid-tied photovoltaics, and smart grid, as well as pulsed power systems.

    Original languageEnglish (US)
    Article number061401
    JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
    Volume29
    Issue number6
    DOIs
    StatePublished - Nov 2011

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Instrumentation
    • Process Chemistry and Technology
    • Surfaces, Coatings and Films
    • Electrical and Electronic Engineering
    • Materials Chemistry

    Fingerprint Dive into the research topics of 'PEN/Si<sub>3</sub>N<sub>4</sub> bilayer film for dc bus capacitors in power converters in hybrid electric vehicles'. Together they form a unique fingerprint.

  • Cite this