Phase equilibria in transition metal Al-Ga-N systems and thermal stability of contacts to AlGaN

K. O. Schweitz, S. E. Mohney

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

As a first step in predicting the phase equilibria in TM-Al-Ga-N systems, where TM denotes a transition metal from the first three transition series, phase equilibria are calculated in the TM-Al-N systems, and the condensed phases in equilibrium with both Aln and N2 gas are discussed with respect to the position of the transition metal in the periodic table, temperature, and nitrogen pressure. Possible phases for use as stable electrical contacts to AlGaN are identified using these predictions, similar previous predictions for the TM-Ga-N systems and experimental findings.

Original languageEnglish (US)
Pages (from-to)175-182
Number of pages8
JournalJournal of Electronic Materials
Volume30
Issue number3
DOIs
StatePublished - Mar 2001

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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