Phase noise reduction in an oscillator through coupling to an internal resonance

D. A. Czaplewski, B. S. Strachan, S. W. Shaw, M. I. Dykman, D. Lopez

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper, we describe an oscillator, operating at room temperature that can be operated in a condition of internal resonance, where a driven, in-plane mode of the MEMS frequency selective resonator interacts with a torsional mode, resulting in 70 dB decrease in phase noise at a 1 Hz offset as compared to the oscillator operating in driven mode alone. The resonator element is a clamped-clamped beam where the primary mode of oscillation is an in-plane flexural mode, which can be driven at a frequency where vibrational energy is coupled to a higher frequency torsional mode. The coupling to the torsional mode stabilizes the vibrational frequency of the primary mode, resulting in a measured phase noise of-90 dBc at 1 Hz offset and an Allan deviation of 4 x 10-9. These oscillators show similar behavior to quartz crystals and could be explored for use in timing applications where, currently, single mode resonator micro-and nano-mechanical oscillators are being used in applications such as clocks and frequency standards. We present a theoretical model that qualitatively explains the behavior and demonstrates that phase noise can be greatly reduced at the internal resonance condition.

Original languageEnglish (US)
Title of host publication2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
EditorsMark G. Allen, Mehran Mehregany
PublisherTransducer Research Foundation
Pages80-82
Number of pages3
ISBN (Electronic)9781940470016
DOIs
StatePublished - 2014
Event2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014 - Hilton Head Island, United States
Duration: Jun 8 2014Jun 12 2014

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
CountryUnited States
CityHilton Head Island
Period6/8/146/12/14

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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