Photo-oxidation of σ-conjugated Si-Si network polymers

R. R. Kunz, M. W. Horn, P. A. Bianconi, A. Smith, C. A. Freed

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

The ultraviolet-induced photooxidation of polyalkylsilyne network polymers has been examined. Infrared and x-ray photoelectron spectroscopies indicate a higher oxygen coordination about the Si atoms following photolysis than observed for the linear polysilanes. A photochemical pathway leading to cleavage of the alkyl groups from the Si backbone has been observed, the products of which then desorb as the respective alkanes or 1-alkenes via a thermally activated process. Finally, the photooxidation rate at 193 nm of thin polyalkylsilyne films is photon limited at fluences less than 1–5 mj/cm2 per pulse; whereas above this fluenee, the photooxidation is oxygen limited. For the latter, the amount of oxygen chemically incorporated into the Si-Si network per laser pulse is dictated by the solubility level of oxidant in the film.

Original languageEnglish (US)
Pages (from-to)1447-1451
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume9
Issue number3
DOIs
StatePublished - May 1991

Fingerprint

Photooxidation
photooxidation
Polymers
Oxygen
polymers
oxygen
Polysilanes
polysilanes
Alkanes
Photolysis
Alkenes
Photoelectron spectroscopy
pulses
Oxidants
Paraffins
x ray spectroscopy
alkanes
alkenes
Olefins
photolysis

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

Kunz, R. R. ; Horn, M. W. ; Bianconi, P. A. ; Smith, A. ; Freed, C. A. / Photo-oxidation of σ-conjugated Si-Si network polymers. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 1991 ; Vol. 9, No. 3. pp. 1447-1451.
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Photo-oxidation of σ-conjugated Si-Si network polymers. / Kunz, R. R.; Horn, M. W.; Bianconi, P. A.; Smith, A.; Freed, C. A.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 9, No. 3, 05.1991, p. 1447-1451.

Research output: Contribution to journalArticle

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T1 - Photo-oxidation of σ-conjugated Si-Si network polymers

AU - Kunz, R. R.

AU - Horn, M. W.

AU - Bianconi, P. A.

AU - Smith, A.

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AB - The ultraviolet-induced photooxidation of polyalkylsilyne network polymers has been examined. Infrared and x-ray photoelectron spectroscopies indicate a higher oxygen coordination about the Si atoms following photolysis than observed for the linear polysilanes. A photochemical pathway leading to cleavage of the alkyl groups from the Si backbone has been observed, the products of which then desorb as the respective alkanes or 1-alkenes via a thermally activated process. Finally, the photooxidation rate at 193 nm of thin polyalkylsilyne films is photon limited at fluences less than 1–5 mj/cm2 per pulse; whereas above this fluenee, the photooxidation is oxygen limited. For the latter, the amount of oxygen chemically incorporated into the Si-Si network per laser pulse is dictated by the solubility level of oxidant in the film.

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