Physical properties of (Ba,Sr)TiO3 thin films used for integrated capacitors in microwave applications

Tito Ayguavives, Ali Tombak, Jon Paul Maria, Gregory T. Stauf, Craig Ragaglia, Jeff Roeder, Amir Mortazawi, Angus I. Kingon

Research output: Contribution to conferencePaperpeer-review

15 Scopus citations

Abstract

Recently, there has been significant interest in use of (Ba,Sr)TiO3 (BST) thin films for tunable high frequency (RF and microwave) components. In this paper we discuss the electrical properties of BST thin films grown by metalorganic chemical vapor deposition (MOCVD) as a function of DC bias and frequency at low frequency (<10 MHz) and high frequency (45 MHz - 18 GHz). Films display low losses (0.002 - 0.006) between 45 and 200 MHz and high tunability (> 50%) over the entire frequency range, making them suitable for these microwave applications. The effect of titanium content, thickness and Pt roughness on dielectric losses and tunability are discussed. Implications for microwave devices are discussed as well. Finally, we report the fabrication of a BST thin film device using a 3-layer mask set to measure electrical properties at RF/microwave frequencies.

Original languageEnglish (US)
Pages365-368
Number of pages4
StatePublished - Dec 1 2000
Event12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, United States
Duration: Jul 21 2000Aug 2 2000

Other

Other12th IEEE International Symposium on Applications of Ferroelectrics
CountryUnited States
CityHonolulu, HI
Period7/21/008/2/00

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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