Physically based predictive model of oxide charging

J. F. Conley, Patrick M. Lenahan, B. D. Wallace

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

A combination of statistical thermodynamics and electron spin resonance (ESR) measurements of defects known as E′ centers is used to develop a physically based predictive model of oxide charging. If is found that this model is in excellent agreement with experimental data.

Original languageEnglish (US)
Title of host publicationInternational Integrated Reliability Workshop Final Report
Editors Anon
PublisherIEEE
Pages134-141
Number of pages8
StatePublished - 1996
EventProceedings of the 1996 International Integrated Reliability Workshop - Lake Tahoe, CA, USA
Duration: Oct 20 1996Oct 23 1996

Other

OtherProceedings of the 1996 International Integrated Reliability Workshop
CityLake Tahoe, CA, USA
Period10/20/9610/23/96

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering

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  • Cite this

    Conley, J. F., Lenahan, P. M., & Wallace, B. D. (1996). Physically based predictive model of oxide charging. In Anon (Ed.), International Integrated Reliability Workshop Final Report (pp. 134-141). IEEE.