Piezoelectric actuators with Cu inner electrode

Y. Takayama; N. J. Donnelly; Clive A. Randall

doi:10.1109/ISAF.2008.4693812

Piezoelectric actuators with Cu inner electrode

Y. Takayama, N. J. Donnelly, Clive A. Randall

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Abstract

The piezoelectric material composition is PZT-SKN with a Li ₂CO₃ flux. This system has been developed successfully for air-fired actuators in PSU with Ag-Pd alloyed inner electrodes. We tried to control the lead activity by adding higher excess PbO in the formulation. Samples were all sintered at 900°C for 6 hours in PO₂ = 5.38×10^-12 atm. With 3.0, 4.0wt% PbO excess addition, we note that density, micro-structure and permittivity are similar and there is a high electro-mechanical performance for example, the high field piezoelectric d ₃₃ was ∼480pm/V. However, there is some decrease in d ₃₃ after the sintering in low PO₂ and Rayleigh coefficients shows PO₂ to slightly suppressing both the intrinsic and extrinsic contribution to piezoelectric properties. Multilayer actuators with copper inner electrode were successfully fabricated with the PZT-SKN after processing with techniques and materials that have low residual carbon.

Original language	English (US)
Title of host publication	17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
Volume	2
DOIs	https://doi.org/10.1109/ISAF.2008.4693812
State	Published - 2008
Event	17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 - Santa Fe, NM, United States Duration: Feb 23 2008 → Feb 28 2008

Other

Other	17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
Country/Territory	United States
City	Santa Fe, NM
Period	2/23/08 → 2/28/08

All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

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10.1109/ISAF.2008.4693812

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@inproceedings{c302b9b674804107826ecf5880bdb936,

title = "Piezoelectric actuators with Cu inner electrode",

abstract = "The piezoelectric material composition is PZT-SKN with a Li 2CO3 flux. This system has been developed successfully for air-fired actuators in PSU with Ag-Pd alloyed inner electrodes. We tried to control the lead activity by adding higher excess PbO in the formulation. Samples were all sintered at 900°C for 6 hours in PO2 = 5.38×10-12 atm. With 3.0, 4.0wt% PbO excess addition, we note that density, micro-structure and permittivity are similar and there is a high electro-mechanical performance for example, the high field piezoelectric d 33 was ∼480pm/V. However, there is some decrease in d 33 after the sintering in low PO2 and Rayleigh coefficients shows PO2 to slightly suppressing both the intrinsic and extrinsic contribution to piezoelectric properties. Multilayer actuators with copper inner electrode were successfully fabricated with the PZT-SKN after processing with techniques and materials that have low residual carbon.",

author = "Y. Takayama and Donnelly, {N. J.} and Randall, {Clive A.}",

year = "2008",

doi = "10.1109/ISAF.2008.4693812",

language = "English (US)",

isbn = "1424427444",

volume = "2",

booktitle = "17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008",

note = "17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 ; Conference date: 23-02-2008 Through 28-02-2008",

}

TY - GEN

T1 - Piezoelectric actuators with Cu inner electrode

AU - Takayama, Y.

AU - Donnelly, N. J.

AU - Randall, Clive A.

PY - 2008

Y1 - 2008

N2 - The piezoelectric material composition is PZT-SKN with a Li 2CO3 flux. This system has been developed successfully for air-fired actuators in PSU with Ag-Pd alloyed inner electrodes. We tried to control the lead activity by adding higher excess PbO in the formulation. Samples were all sintered at 900°C for 6 hours in PO2 = 5.38×10-12 atm. With 3.0, 4.0wt% PbO excess addition, we note that density, micro-structure and permittivity are similar and there is a high electro-mechanical performance for example, the high field piezoelectric d 33 was ∼480pm/V. However, there is some decrease in d 33 after the sintering in low PO2 and Rayleigh coefficients shows PO2 to slightly suppressing both the intrinsic and extrinsic contribution to piezoelectric properties. Multilayer actuators with copper inner electrode were successfully fabricated with the PZT-SKN after processing with techniques and materials that have low residual carbon.

AB - The piezoelectric material composition is PZT-SKN with a Li 2CO3 flux. This system has been developed successfully for air-fired actuators in PSU with Ag-Pd alloyed inner electrodes. We tried to control the lead activity by adding higher excess PbO in the formulation. Samples were all sintered at 900°C for 6 hours in PO2 = 5.38×10-12 atm. With 3.0, 4.0wt% PbO excess addition, we note that density, micro-structure and permittivity are similar and there is a high electro-mechanical performance for example, the high field piezoelectric d 33 was ∼480pm/V. However, there is some decrease in d 33 after the sintering in low PO2 and Rayleigh coefficients shows PO2 to slightly suppressing both the intrinsic and extrinsic contribution to piezoelectric properties. Multilayer actuators with copper inner electrode were successfully fabricated with the PZT-SKN after processing with techniques and materials that have low residual carbon.

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U2 - 10.1109/ISAF.2008.4693812

DO - 10.1109/ISAF.2008.4693812

M3 - Conference contribution

AN - SCOPUS:58149515788

SN - 1424427444

SN - 9781424427444

VL - 2

BT - 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008

T2 - 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008

Y2 - 23 February 2008 through 28 February 2008

ER -

Piezoelectric actuators with Cu inner electrode

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