Piezoelectric actuators with Cu inner electrode

Y. Takayama, N. J. Donnelly, Clive A. Randall

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

The piezoelectric material composition is PZT-SKN with a Li 2CO3 flux. This system has been developed successfully for air-fired actuators in PSU with Ag-Pd alloyed inner electrodes. We tried to control the lead activity by adding higher excess PbO in the formulation. Samples were all sintered at 900°C for 6 hours in PO2 = 5.38×10-12 atm. With 3.0, 4.0wt% PbO excess addition, we note that density, micro-structure and permittivity are similar and there is a high electro-mechanical performance for example, the high field piezoelectric d 33 was ∼480pm/V. However, there is some decrease in d 33 after the sintering in low PO2 and Rayleigh coefficients shows PO2 to slightly suppressing both the intrinsic and extrinsic contribution to piezoelectric properties. Multilayer actuators with copper inner electrode were successfully fabricated with the PZT-SKN after processing with techniques and materials that have low residual carbon.

Original languageEnglish (US)
Title of host publication17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
Volume2
DOIs
StatePublished - 2008
Event17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 - Santa Fe, NM, United States
Duration: Feb 23 2008Feb 28 2008

Other

Other17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008
CountryUnited States
CitySanta Fe, NM
Period2/23/082/28/08

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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    Takayama, Y., Donnelly, N. J., & Randall, C. A. (2008). Piezoelectric actuators with Cu inner electrode. In 17th IEEE International Symposium on the Applications of Ferroelectrics, ISAF 2008 (Vol. 2). [4693812] https://doi.org/10.1109/ISAF.2008.4693812