Abstract
In these several years piezoelectric and electro-strictive actuators have become very popular for micro-positioning in optical and precision machinery fields. Aiming at wide commercialization of these actuators, many investigations have been made in the improvement of ceramic materials for actuators, designs of the devices and control and systemization of the actuators. This paper reviews recent applications of piezoelectric/electrostrictive ceramics from a viewpoint of "smart" actuators and systems.
Original language | English (US) |
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Article number | 17770Z |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 1777 |
DOIs | |
State | Published - May 1 1992 |
Event | 1st European Conference on Smart Structures and Materials 1992 - Glasgow, United Kingdom Duration: May 12 1992 → May 14 1992 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering