Piezoelectric Characterization

Piezoelectric coefficients need to be measured accurately over a wide range of temperature, drive field amplitude, and frequency, in order to predict device performance appropriately. There are multiple methods available for such characterization in bulk materials and thin films. This paper overviews some of the standard characterization tools, with an emphasis on the methods utilized in the IEEE Standard on Piezoelectricity. In addition, several of the evolving methods for making accurate piezoelectric coefficient measurements on thin films are reviewed. Some of the common artifacts in piezoelectric measurements, as well as means of avoiding them, are discussed.