Abstract
Piezoelectric coefficients need to be measured accurately over a wide range of temperature, drive field amplitude, and frequency, in order to predict device performance appropriately. There are multiple methods available for such characterization in bulk materials and thin films. This paper overviews some of the standard characterization tools, with an emphasis on the methods utilized in the IEEE Standard on Piezoelectricity. In addition, several of the evolving methods for making accurate piezoelectric coefficient measurements on thin films are reviewed. Some of the common artifacts in piezoelectric measurements, as well as means of avoiding them, are discussed.
| Original language | English (US) |
|---|---|
| Title of host publication | Polar Oxides |
| Subtitle of host publication | Properties, Characterization, and Imaging |
| Publisher | Wiley - VCH Verlag GmbH & CO. KGaA |
| Pages | 39-52 |
| Number of pages | 14 |
| ISBN (Print) | 3527405321, 9783527405329 |
| DOIs | |
| State | Published - Aug 9 2005 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
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Piezoelectric Characterization. / Trolier-McKinstry, Susan E.
Polar Oxides: Properties, Characterization, and Imaging. Wiley - VCH Verlag GmbH & CO. KGaA, 2005. p. 39-52.Research output: Chapter in Book/Report/Conference proceeding › Chapter
TY - CHAP
T1 - Piezoelectric Characterization
AU - Trolier-McKinstry, Susan E.
PY - 2005/8/9
Y1 - 2005/8/9
N2 - Piezoelectric coefficients need to be measured accurately over a wide range of temperature, drive field amplitude, and frequency, in order to predict device performance appropriately. There are multiple methods available for such characterization in bulk materials and thin films. This paper overviews some of the standard characterization tools, with an emphasis on the methods utilized in the IEEE Standard on Piezoelectricity. In addition, several of the evolving methods for making accurate piezoelectric coefficient measurements on thin films are reviewed. Some of the common artifacts in piezoelectric measurements, as well as means of avoiding them, are discussed.
AB - Piezoelectric coefficients need to be measured accurately over a wide range of temperature, drive field amplitude, and frequency, in order to predict device performance appropriately. There are multiple methods available for such characterization in bulk materials and thin films. This paper overviews some of the standard characterization tools, with an emphasis on the methods utilized in the IEEE Standard on Piezoelectricity. In addition, several of the evolving methods for making accurate piezoelectric coefficient measurements on thin films are reviewed. Some of the common artifacts in piezoelectric measurements, as well as means of avoiding them, are discussed.
UR - http://www.scopus.com/inward/record.url?scp=84889484960&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84889484960&partnerID=8YFLogxK
U2 - 10.1002/3527604650.ch2
DO - 10.1002/3527604650.ch2
M3 - Chapter
AN - SCOPUS:84889484960
SN - 3527405321
SN - 9783527405329
SP - 39
EP - 52
BT - Polar Oxides
PB - Wiley - VCH Verlag GmbH & CO. KGaA
ER -