Piezoelectric films for MEMS applications

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Piezoelectric thin films are attractive for applications in MicroElectroMechanical Systems (MEMS) due to the combination of high energy density and low power requirements relative to other on-chip actuation mechanisms. As such, they can be utilized for applications as diverse as the pumping systems in miniature analytical instrumentation, high sensitivity accelerometers and hydrophones, miniature motors, and high frequency biomedical ultrasound, for example. Critical in all of these applications is the magnitude of the electromechanical response that can be generated. This paper will focus on the factors which affect the measured piezoelectric response of ferroelectric thin films. Particular emphasis will be placed on the effects of substrate clamping, clamping of the extrinsic contributions to the properties, and the role of preferred polarization directions in increasing the long-term reliability of ferroelectric films for piezoelectric applications.

Original languageEnglish (US)
JournalJournal of the Ceramic Society of Japan
Volume109
Issue number1269
StatePublished - Jan 1 2001

Fingerprint

microelectromechanical systems
MEMS
Ferroelectric films
Ferroelectric thin films
Hydrophones
hydrophones
accelerometers
thin films
actuation
Accelerometers
pumping
flux density
Ultrasonics
chips
Polarization
Thin films
requirements
sensitivity
Substrates
polarization

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

Cite this

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abstract = "Piezoelectric thin films are attractive for applications in MicroElectroMechanical Systems (MEMS) due to the combination of high energy density and low power requirements relative to other on-chip actuation mechanisms. As such, they can be utilized for applications as diverse as the pumping systems in miniature analytical instrumentation, high sensitivity accelerometers and hydrophones, miniature motors, and high frequency biomedical ultrasound, for example. Critical in all of these applications is the magnitude of the electromechanical response that can be generated. This paper will focus on the factors which affect the measured piezoelectric response of ferroelectric thin films. Particular emphasis will be placed on the effects of substrate clamping, clamping of the extrinsic contributions to the properties, and the role of preferred polarization directions in increasing the long-term reliability of ferroelectric films for piezoelectric applications.",
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Piezoelectric films for MEMS applications. / Trolier-McKinstry, Susan E.

In: Journal of the Ceramic Society of Japan, Vol. 109, No. 1269, 01.01.2001.

Research output: Contribution to journalArticle

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AB - Piezoelectric thin films are attractive for applications in MicroElectroMechanical Systems (MEMS) due to the combination of high energy density and low power requirements relative to other on-chip actuation mechanisms. As such, they can be utilized for applications as diverse as the pumping systems in miniature analytical instrumentation, high sensitivity accelerometers and hydrophones, miniature motors, and high frequency biomedical ultrasound, for example. Critical in all of these applications is the magnitude of the electromechanical response that can be generated. This paper will focus on the factors which affect the measured piezoelectric response of ferroelectric thin films. Particular emphasis will be placed on the effects of substrate clamping, clamping of the extrinsic contributions to the properties, and the role of preferred polarization directions in increasing the long-term reliability of ferroelectric films for piezoelectric applications.

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