Piezoelectric micro-flextensional actuator

Jongpil Cheong, Srinivas A. Tadigadapa, Christopher D. Rahn

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

This paper presents a novel micro flextensional actuator design consisting of bulk PZT bonded to a silicon microbeam. The fabrication process includes boron doping, EDP etching, dicing, and bonding to produce actuators with large displacements (8.7 μm) and gain factors (32) at 100V. The theoretical model predicts that a thin beam with properly designed initial imperfection maximizes the actuator displacement and gain factor. For large PZT displacement, small imperfection maximizes gain factor but may not gaurantee, the desired (up or down) displacement direction. For small PZT displacement, large initial imperfection improves performance and guarantees displacement in the (desired) direction of the initial imperfection. The theoretical model, based on the measured initial beam shape, predicts the experimentally measured direction and magnitude of beam displacement for two devices.

Original languageEnglish (US)
Pages (from-to)106-114
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5344
DOIs
StatePublished - May 10 2004
EventMEMS/MOEMS Components and Their Applications - San Jose, CA., United States
Duration: Jan 26 2004Jan 27 2004

Fingerprint

Actuator
Imperfections
Actuators
actuators
Defects
Large Displacements
Theoretical Model
defects
Maximise
Boron
Silicon
Predict
Etching
Doping (additives)
Fabrication
microbeams
Model-based
boron
Direction compound
etching

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

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title = "Piezoelectric micro-flextensional actuator",
abstract = "This paper presents a novel micro flextensional actuator design consisting of bulk PZT bonded to a silicon microbeam. The fabrication process includes boron doping, EDP etching, dicing, and bonding to produce actuators with large displacements (8.7 μm) and gain factors (32) at 100V. The theoretical model predicts that a thin beam with properly designed initial imperfection maximizes the actuator displacement and gain factor. For large PZT displacement, small imperfection maximizes gain factor but may not gaurantee, the desired (up or down) displacement direction. For small PZT displacement, large initial imperfection improves performance and guarantees displacement in the (desired) direction of the initial imperfection. The theoretical model, based on the measured initial beam shape, predicts the experimentally measured direction and magnitude of beam displacement for two devices.",
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Piezoelectric micro-flextensional actuator. / Cheong, Jongpil; Tadigadapa, Srinivas A.; Rahn, Christopher D.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5344, 10.05.2004, p. 106-114.

Research output: Contribution to journalConference article

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