Abstract
This paper presents a novel micro flextensional actuator design consisting of bulk PZT bonded to a silicon microbeam. The fabrication process includes boron doping, EDP etching, dicing, and bonding to produce actuators with large displacements (8.7 μm) and gain factors (32) at 100V. The theoretical model predicts that a thin beam with properly designed initial imperfection maximizes the actuator displacement and gain factor. For large PZT displacement, small imperfection maximizes gain factor but may not gaurantee, the desired (up or down) displacement direction. For small PZT displacement, large initial imperfection improves performance and guarantees displacement in the (desired) direction of the initial imperfection. The theoretical model, based on the measured initial beam shape, predicts the experimentally measured direction and magnitude of beam displacement for two devices.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 106-114 |
| Number of pages | 9 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5344 |
| DOIs | |
| State | Published - May 10 2004 |
| Event | MEMS/MOEMS Components and Their Applications - San Jose, CA., United States Duration: Jan 26 2004 → Jan 27 2004 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
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Piezoelectric micro-flextensional actuator. / Cheong, Jongpil; Tadigadapa, Srinivas A.; Rahn, Christopher D.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5344, 10.05.2004, p. 106-114.Research output: Contribution to journal › Conference article
TY - JOUR
T1 - Piezoelectric micro-flextensional actuator
AU - Cheong, Jongpil
AU - Tadigadapa, Srinivas A.
AU - Rahn, Christopher D.
PY - 2004/5/10
Y1 - 2004/5/10
N2 - This paper presents a novel micro flextensional actuator design consisting of bulk PZT bonded to a silicon microbeam. The fabrication process includes boron doping, EDP etching, dicing, and bonding to produce actuators with large displacements (8.7 μm) and gain factors (32) at 100V. The theoretical model predicts that a thin beam with properly designed initial imperfection maximizes the actuator displacement and gain factor. For large PZT displacement, small imperfection maximizes gain factor but may not gaurantee, the desired (up or down) displacement direction. For small PZT displacement, large initial imperfection improves performance and guarantees displacement in the (desired) direction of the initial imperfection. The theoretical model, based on the measured initial beam shape, predicts the experimentally measured direction and magnitude of beam displacement for two devices.
AB - This paper presents a novel micro flextensional actuator design consisting of bulk PZT bonded to a silicon microbeam. The fabrication process includes boron doping, EDP etching, dicing, and bonding to produce actuators with large displacements (8.7 μm) and gain factors (32) at 100V. The theoretical model predicts that a thin beam with properly designed initial imperfection maximizes the actuator displacement and gain factor. For large PZT displacement, small imperfection maximizes gain factor but may not gaurantee, the desired (up or down) displacement direction. For small PZT displacement, large initial imperfection improves performance and guarantees displacement in the (desired) direction of the initial imperfection. The theoretical model, based on the measured initial beam shape, predicts the experimentally measured direction and magnitude of beam displacement for two devices.
UR - http://www.scopus.com/inward/record.url?scp=2142656055&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=2142656055&partnerID=8YFLogxK
U2 - 10.1117/12.524817
DO - 10.1117/12.524817
M3 - Conference article
AN - SCOPUS:2142656055
VL - 5344
SP - 106
EP - 114
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
SN - 0277-786X
ER -