This manuscript reviews the developments made in design and fabrication of piezoelectric microgenera- tors and presents a method for making a comparative study within various vibration energy harvesting mechanisms. Current generation vibration energy harvesters have power density in the range of 0.8 μW/mm 3. The manuscript also reports our results on synthesis of barium titanate (BT) thin films for MEMS (micro-electromechanical systems) based energy harvester. BT sol-gel was synthesized by aqueous process using barium acetate and titanium bis (ammonium lacto) dihydrox- ide with PVP (Polyvinylpyrrolidone). After optimizing the annealing temperature and time, textured BT films with 600 nm thickness were obtained on (111) Pt/Ti/SiO 2 wafer. A MEMS fabrication process flow was designed to produce microcantile- ver chips from BT films constituting 6 cantilevers connected in series with an interdigital electrode pattern. We also present some concepts for further improvement of the power density of vibration energy harvesters by incorporating 3-D structure, magnetoelectric material, and a multimodal scheme.
|Original language||English (US)|
|Number of pages||14|
|Journal||IEEE transactions on ultrasonics, ferroelectrics, and frequency control|
|State||Published - Aug 1 2009|
All Science Journal Classification (ASJC) codes
- Acoustics and Ultrasonics
- Electrical and Electronic Engineering