Piezoelectric nanoelectromechanical systems integrating microcontact printed lead zirconate titanate films

Daisuke Saya, Denis Dezest, Aaron J. Welsh, Fabrice Mathieu, Olivier Thomas, Thierry Leïchlé, Susan Trolier-Mckinstry, Liviu Nicu

Research output: Contribution to journalArticle

Abstract

A piezoelectric nanoelectromechanical system (NEMS) with integrated actuation and detection capabilities was fabricated using lead zirconate titanate (PZT) thin films patterned by microcontact printing. PZT-coated cantilever resonators of various dimensions were fabricated to assess the variability in PZT properties as a function of the device dimensions; the microcontact-printed PZT was 281 nm thick. PZT layers of the cantilevers were poled at 107 kV cm-1 and 150 °C to improve their piezoelectric properties. It was demonstrated that PZT piezoelectrics can be utilized for simultaneous actuation and detection of resonance. The PZT cantilevers were analytically modelled to estimate values of their piezoelectric coefficient d 31. Mechanical tip displacement detection of the cantilevers by laser vibrometer was also carried out to validate the estimation of d 31

Original languageEnglish (US)
Article number035004
JournalJournal of Micromechanics and Microengineering
Volume30
Issue number3
DOIs
StatePublished - Jan 1 2020

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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