Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities

O. Thomas, F. Mathieu, W. Mansfield, C. Huang, S. Trolier-McKinstry, L. Nicu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.

Original languageEnglish (US)
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages588-591
Number of pages4
DOIs
StatePublished - 2013
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: Jan 20 2013Jan 24 2013

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period1/20/131/24/13

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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