Piezoelectric T-beam microactuators

Hareesh K R Kommepalli, Christopher D. Rahn, Andrew D. Hirsh, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

Original languageEnglish (US)
Title of host publication2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
Pages909-914
Number of pages6
Volume4
StatePublished - 2009
Event2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008 - New York City, NY, United States
Duration: Aug 3 2008Aug 6 2008

Other

Other2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
CountryUnited States
CityNew York City, NY
Period8/3/088/6/08

Fingerprint

Microactuators
Actuators
Stairs
Electrodes
Reactive ion etching
Flanges
MEMS
Etching
Fabrication
Geometry

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computational Theory and Mathematics
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

Cite this

Kommepalli, H. K. R., Rahn, C. D., Hirsh, A. D., & Tadigadapa, S. A. (2009). Piezoelectric T-beam microactuators. In 2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008 (Vol. 4, pp. 909-914)
Kommepalli, Hareesh K R ; Rahn, Christopher D. ; Hirsh, Andrew D. ; Tadigadapa, Srinivas A. / Piezoelectric T-beam microactuators. 2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008. Vol. 4 2009. pp. 909-914
@inproceedings{68781c78f2a742c6bfbd7734781b42ce,
title = "Piezoelectric T-beam microactuators",
abstract = "This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.",
author = "Kommepalli, {Hareesh K R} and Rahn, {Christopher D.} and Hirsh, {Andrew D.} and Tadigadapa, {Srinivas A.}",
year = "2009",
language = "English (US)",
isbn = "9780791843253",
volume = "4",
pages = "909--914",
booktitle = "2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008",

}

Kommepalli, HKR, Rahn, CD, Hirsh, AD & Tadigadapa, SA 2009, Piezoelectric T-beam microactuators. in 2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008. vol. 4, pp. 909-914, 2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008, New York City, NY, United States, 8/3/08.

Piezoelectric T-beam microactuators. / Kommepalli, Hareesh K R; Rahn, Christopher D.; Hirsh, Andrew D.; Tadigadapa, Srinivas A.

2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008. Vol. 4 2009. p. 909-914.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Piezoelectric T-beam microactuators

AU - Kommepalli, Hareesh K R

AU - Rahn, Christopher D.

AU - Hirsh, Andrew D.

AU - Tadigadapa, Srinivas A.

PY - 2009

Y1 - 2009

N2 - This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

AB - This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

UR - http://www.scopus.com/inward/record.url?scp=69949133354&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=69949133354&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:69949133354

SN - 9780791843253

SN - 9780791843284

VL - 4

SP - 909

EP - 914

BT - 2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008

ER -

Kommepalli HKR, Rahn CD, Hirsh AD, Tadigadapa SA. Piezoelectric T-beam microactuators. In 2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008. Vol. 4. 2009. p. 909-914