Piezoelectric T-beam microactuators

Hareesh K.R. Kommepalli, Christopher D. Rahn, Andrew D. Hirsh, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

Original languageEnglish (US)
Title of host publication2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
Pages909-914
Number of pages6
StatePublished - Nov 23 2009
Event2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008 - New York City, NY, United States
Duration: Aug 3 2008Aug 6 2008

Publication series

Name2008 Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
Volume4

Other

Other2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, DETC 2008
CountryUnited States
CityNew York City, NY
Period8/3/088/6/08

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Computational Theory and Mathematics
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

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