Abstract
This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.
| Original language | English (US) |
|---|---|
| Title of host publication | ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 |
| Pages | 909-914 |
| Number of pages | 6 |
| Volume | 4 |
| DOIs | |
| State | Published - Dec 1 2008 |
| Event | ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 - Brooklyn, NY, United States Duration: Aug 3 2008 → Aug 6 2008 |
Other
| Other | ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 |
|---|---|
| Country | United States |
| City | Brooklyn, NY |
| Period | 8/3/08 → 8/6/08 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Modeling and Simulation
- Mechanical Engineering
- Computer Science Applications
- Computer Graphics and Computer-Aided Design
Cite this
}
Piezoelectric T-beam microactuators. / Kommepalli, Hareesh K R; Hirsh, Andrew D.; Rahn, Christopher D.; Tadigadapa, Srinivas A.
ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008. Vol. 4 2008. p. 909-914.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Piezoelectric T-beam microactuators
AU - Kommepalli, Hareesh K R
AU - Hirsh, Andrew D.
AU - Rahn, Christopher D.
AU - Tadigadapa, Srinivas A.
PY - 2008/12/1
Y1 - 2008/12/1
N2 - This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.
AB - This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.
UR - http://www.scopus.com/inward/record.url?scp=81155123701&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=81155123701&partnerID=8YFLogxK
U2 - 10.1115/DETC2008-49886
DO - 10.1115/DETC2008-49886
M3 - Conference contribution
AN - SCOPUS:81155123701
SN - 9780791843284
VL - 4
SP - 909
EP - 914
BT - ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008
ER -