Piezoelectric T-beam microactuators

Hareesh K R Kommepalli, Andrew D. Hirsh, Christopher D. Rahn, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

Original languageEnglish (US)
Title of host publicationASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008
Pages909-914
Number of pages6
Volume4
DOIs
StatePublished - Dec 1 2008
EventASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 - Brooklyn, NY, United States
Duration: Aug 3 2008Aug 6 2008

Other

OtherASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008
CountryUnited States
CityBrooklyn, NY
Period8/3/088/6/08

Fingerprint

Microactuator
Microactuators
Actuators
Stairs
Electrodes
Electrode
Actuator
Reactive ion etching
Flanges
MEMS
Etching
Micro-electro-mechanical Systems
Fabrication
Geometry
Chip
Cross section
Predict
Model

All Science Journal Classification (ASJC) codes

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

Cite this

Kommepalli, H. K. R., Hirsh, A. D., Rahn, C. D., & Tadigadapa, S. A. (2008). Piezoelectric T-beam microactuators. In ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 (Vol. 4, pp. 909-914) https://doi.org/10.1115/DETC2008-49886
Kommepalli, Hareesh K R ; Hirsh, Andrew D. ; Rahn, Christopher D. ; Tadigadapa, Srinivas A. / Piezoelectric T-beam microactuators. ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008. Vol. 4 2008. pp. 909-914
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Kommepalli, HKR, Hirsh, AD, Rahn, CD & Tadigadapa, SA 2008, Piezoelectric T-beam microactuators. in ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008. vol. 4, pp. 909-914, ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008, Brooklyn, NY, United States, 8/3/08. https://doi.org/10.1115/DETC2008-49886

Piezoelectric T-beam microactuators. / Kommepalli, Hareesh K R; Hirsh, Andrew D.; Rahn, Christopher D.; Tadigadapa, Srinivas A.

ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008. Vol. 4 2008. p. 909-914.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

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Kommepalli HKR, Hirsh AD, Rahn CD, Tadigadapa SA. Piezoelectric T-beam microactuators. In ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008. Vol. 4. 2008. p. 909-914 https://doi.org/10.1115/DETC2008-49886