Piezoelectric T-beam microactuators

Hareesh K R Kommepalli; Andrew D. Hirsh; Christopher D. Rahn; Srinivas A. Tadigadapa

doi:10.1115/DETC2008-49886

Piezoelectric T-beam microactuators

Hareesh K R Kommepalli, Andrew D. Hirsh, Christopher D. Rahn, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Abstract

This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

Original language	English (US)
Title of host publication	ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008
Pages	909-914
Number of pages	6
Volume	4
DOIs	https://doi.org/10.1115/DETC2008-49886
State	Published - Dec 1 2008
Event	ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 - Brooklyn, NY, United States Duration: Aug 3 2008 → Aug 6 2008

Other

Other	ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008
Country/Territory	United States
City	Brooklyn, NY
Period	8/3/08 → 8/6/08

All Science Journal Classification (ASJC) codes

Modeling and Simulation
Mechanical Engineering
Computer Science Applications
Computer Graphics and Computer-Aided Design

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10.1115/DETC2008-49886

Cite this

@inproceedings{2f189c6bc0c5446cbc06b38d4e3d1caf,

title = "Piezoelectric T-beam microactuators",

abstract = "This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.",

author = "Kommepalli, {Hareesh K R} and Hirsh, {Andrew D.} and Rahn, {Christopher D.} and Tadigadapa, {Srinivas A.}",

year = "2008",

month = dec,

day = "1",

doi = "10.1115/DETC2008-49886",

language = "English (US)",

isbn = "9780791843284",

volume = "4",

pages = "909--914",

booktitle = "ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008",

note = "ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 ; Conference date: 03-08-2008 Through 06-08-2008",

}

Kommepalli, HKR, Hirsh, AD, Rahn, CD & Tadigadapa, SA 2008, Piezoelectric T-beam microactuators. in ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008. vol. 4, pp. 909-914, ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008, Brooklyn, NY, United States, 8/3/08. https://doi.org/10.1115/DETC2008-49886

TY - GEN

T1 - Piezoelectric T-beam microactuators

AU - Kommepalli, Hareesh K R

AU - Hirsh, Andrew D.

AU - Rahn, Christopher D.

AU - Tadigadapa, Srinivas A.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

AB - This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.

UR - http://www.scopus.com/inward/record.url?scp=81155123701&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=81155123701&partnerID=8YFLogxK

U2 - 10.1115/DETC2008-49886

DO - 10.1115/DETC2008-49886

M3 - Conference contribution

AN - SCOPUS:81155123701

SN - 9780791843284

VL - 4

SP - 909

EP - 914

BT - ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008

T2 - ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008

Y2 - 3 August 2008 through 6 August 2008

ER -

Piezoelectric T-beam microactuators

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