Abstract
This paper introduces a novel T-beam actuator fabricated by a piezoelectric MEMS fabrication process. ICP-RIE etching from the front and back of a bulk PZT chip is used to produce stair stepped structures through the thickness with complex inplane shapes. Masked electrode deposition creates active and passive regions in the PZT structure. With a T-shaped crosssection, and bottom and top flange and web electrodes, a cantilevered beam can bend in-plane and out-of-plane with bimorph actuation in both directions. One of these T-beam actuators is fabricated and experimentally tested. An experimentally validated model predicts that the cross-section geometry can be optimized to produce higher displacement and blocking force.
Original language | English (US) |
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Title of host publication | ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 |
Pages | 909-914 |
Number of pages | 6 |
Volume | 4 |
DOIs | |
State | Published - Dec 1 2008 |
Event | ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 - Brooklyn, NY, United States Duration: Aug 3 2008 → Aug 6 2008 |
Other
Other | ASME 2008 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2008 |
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Country/Territory | United States |
City | Brooklyn, NY |
Period | 8/3/08 → 8/6/08 |
All Science Journal Classification (ASJC) codes
- Modeling and Simulation
- Mechanical Engineering
- Computer Science Applications
- Computer Graphics and Computer-Aided Design