Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices

Tianning Liu, Margeaux Wallace, Susan E. Trolier-McKinstry, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Flexible 2.5 cm × 2.5 cm PZT thin films on polyimide substrate were successfully obtained through a release and transfer process developed in this work. The released films not only functioned, but had superior properties compared to films grown on silicon wafers. This approach to flexible piezoelectric devices provides opportunities for sensors, transducers, and energy harvesters.

Original languageEnglish (US)
Title of host publication75th Annual Device Research Conference, DRC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509063277
DOIs
StatePublished - Aug 1 2017
Event75th Annual Device Research Conference, DRC 2017 - South Bend, United States
Duration: Jun 25 2017Jun 28 2017

Other

Other75th Annual Device Research Conference, DRC 2017
CountryUnited States
CitySouth Bend
Period6/25/176/28/17

Fingerprint

Piezoelectric devices
Polyimides
Thin films
Harvesters
Substrates
Silicon wafers
Transducers
Sensors

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Liu, T., Wallace, M., Trolier-McKinstry, S. E., & Jackson, T. N. (2017). Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices. In 75th Annual Device Research Conference, DRC 2017 [7999459] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DRC.2017.7999459
Liu, Tianning ; Wallace, Margeaux ; Trolier-McKinstry, Susan E. ; Jackson, Thomas Nelson. / Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices. 75th Annual Device Research Conference, DRC 2017. Institute of Electrical and Electronics Engineers Inc., 2017.
@inproceedings{468b792f87bc458eb57af8531d371005,
title = "Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices",
abstract = "Flexible 2.5 cm × 2.5 cm PZT thin films on polyimide substrate were successfully obtained through a release and transfer process developed in this work. The released films not only functioned, but had superior properties compared to films grown on silicon wafers. This approach to flexible piezoelectric devices provides opportunities for sensors, transducers, and energy harvesters.",
author = "Tianning Liu and Margeaux Wallace and Trolier-McKinstry, {Susan E.} and Jackson, {Thomas Nelson}",
year = "2017",
month = "8",
day = "1",
doi = "10.1109/DRC.2017.7999459",
language = "English (US)",
booktitle = "75th Annual Device Research Conference, DRC 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
address = "United States",

}

Liu, T, Wallace, M, Trolier-McKinstry, SE & Jackson, TN 2017, Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices. in 75th Annual Device Research Conference, DRC 2017., 7999459, Institute of Electrical and Electronics Engineers Inc., 75th Annual Device Research Conference, DRC 2017, South Bend, United States, 6/25/17. https://doi.org/10.1109/DRC.2017.7999459

Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices. / Liu, Tianning; Wallace, Margeaux; Trolier-McKinstry, Susan E.; Jackson, Thomas Nelson.

75th Annual Device Research Conference, DRC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. 7999459.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices

AU - Liu, Tianning

AU - Wallace, Margeaux

AU - Trolier-McKinstry, Susan E.

AU - Jackson, Thomas Nelson

PY - 2017/8/1

Y1 - 2017/8/1

N2 - Flexible 2.5 cm × 2.5 cm PZT thin films on polyimide substrate were successfully obtained through a release and transfer process developed in this work. The released films not only functioned, but had superior properties compared to films grown on silicon wafers. This approach to flexible piezoelectric devices provides opportunities for sensors, transducers, and energy harvesters.

AB - Flexible 2.5 cm × 2.5 cm PZT thin films on polyimide substrate were successfully obtained through a release and transfer process developed in this work. The released films not only functioned, but had superior properties compared to films grown on silicon wafers. This approach to flexible piezoelectric devices provides opportunities for sensors, transducers, and energy harvesters.

UR - http://www.scopus.com/inward/record.url?scp=85028072297&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85028072297&partnerID=8YFLogxK

U2 - 10.1109/DRC.2017.7999459

DO - 10.1109/DRC.2017.7999459

M3 - Conference contribution

AN - SCOPUS:85028072297

BT - 75th Annual Device Research Conference, DRC 2017

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Liu T, Wallace M, Trolier-McKinstry SE, Jackson TN. Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices. In 75th Annual Device Research Conference, DRC 2017. Institute of Electrical and Electronics Engineers Inc. 2017. 7999459 https://doi.org/10.1109/DRC.2017.7999459