Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices

Tianning Liu; Margeaux Wallace; Susan E. Trolier-McKinstry; Thomas Nelson Jackson

doi:10.1109/DRC.2017.7999459

Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices

Tianning Liu, Margeaux Wallace, Susan E. Trolier-McKinstry, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Flexible 2.5 cm × 2.5 cm PZT thin films on polyimide substrate were successfully obtained through a release and transfer process developed in this work. The released films not only functioned, but had superior properties compared to films grown on silicon wafers. This approach to flexible piezoelectric devices provides opportunities for sensors, transducers, and energy harvesters.

Original language	English (US)
Title of host publication	75th Annual Device Research Conference, DRC 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781509063277
DOIs	https://doi.org/10.1109/DRC.2017.7999459
Publication status	Published - Aug 1 2017
Event	75th Annual Device Research Conference, DRC 2017 - South Bend, United States Duration: Jun 25 2017 → Jun 28 2017

Other

Other	75th Annual Device Research Conference, DRC 2017
Country	United States
City	South Bend
Period	6/25/17 → 6/28/17

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All Science Journal Classification (ASJC) codes

Electrical and Electronic Engineering

Cite this

Liu, T., Wallace, M., Trolier-McKinstry, S. E., & Jackson, T. N. (2017). Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices. In 75th Annual Device Research Conference, DRC 2017 [7999459] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DRC.2017.7999459

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Liu, T, Wallace, M, Trolier-McKinstry, SE & Jackson, TN 2017, Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices. in 75th Annual Device Research Conference, DRC 2017., 7999459, Institute of Electrical and Electronics Engineers Inc., 75th Annual Device Research Conference, DRC 2017, South Bend, United States, 6/25/17. https://doi.org/10.1109/DRC.2017.7999459

Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices. / Liu, Tianning; Wallace, Margeaux; Trolier-McKinstry, Susan E.; Jackson, Thomas Nelson.

75th Annual Device Research Conference, DRC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. 7999459.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Access to Document

10.1109/DRC.2017.7999459