Abstract
Flexible 2.5 cm × 2.5 cm PZT thin films on polyimide substrate were successfully obtained through a release and transfer process developed in this work. The released films not only functioned, but had superior properties compared to films grown on silicon wafers. This approach to flexible piezoelectric devices provides opportunities for sensors, transducers, and energy harvesters.
Original language | English (US) |
---|---|
Title of host publication | 75th Annual Device Research Conference, DRC 2017 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 9781509063277 |
DOIs | |
State | Published - Aug 1 2017 |
Event | 75th Annual Device Research Conference, DRC 2017 - South Bend, United States Duration: Jun 25 2017 → Jun 28 2017 |
Other
Other | 75th Annual Device Research Conference, DRC 2017 |
---|---|
Country/Territory | United States |
City | South Bend |
Period | 6/25/17 → 6/28/17 |
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering