Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices

Tianning Liu, Margeaux Wallace, Susan E. Trolier-McKinstry, Thomas Nelson Jackson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Flexible 2.5 cm × 2.5 cm PZT thin films on polyimide substrate were successfully obtained through a release and transfer process developed in this work. The released films not only functioned, but had superior properties compared to films grown on silicon wafers. This approach to flexible piezoelectric devices provides opportunities for sensors, transducers, and energy harvesters.

Original languageEnglish (US)
Title of host publication75th Annual Device Research Conference, DRC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509063277
DOIs
Publication statusPublished - Aug 1 2017
Event75th Annual Device Research Conference, DRC 2017 - South Bend, United States
Duration: Jun 25 2017Jun 28 2017

Other

Other75th Annual Device Research Conference, DRC 2017
CountryUnited States
CitySouth Bend
Period6/25/176/28/17

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Liu, T., Wallace, M., Trolier-McKinstry, S. E., & Jackson, T. N. (2017). Piezoelectric thin films on polyimide substrates for flexible piezoelectric devices. In 75th Annual Device Research Conference, DRC 2017 [7999459] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DRC.2017.7999459