piezoelectric transducers using micromachined bulk piezo substrates

Xiaoning Jiang, K. A. Snook, W. S. Hackenberger, A. Cheng, J. Xu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of > 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (> 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.

Original languageEnglish (US)
Title of host publication2008 IEEE Sensors, SENSORS 2008
Pages573-576
Number of pages4
DOIs
StatePublished - Dec 1 2008
Event2008 IEEE Sensors, SENSORS 2008 - Lecce, Italy
Duration: Oct 26 2008Oct 29 2008

Publication series

NameProceedings of IEEE Sensors

Other

Other2008 IEEE Sensors, SENSORS 2008
CountryItaly
CityLecce
Period10/26/0810/29/08

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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    Jiang, X., Snook, K. A., Hackenberger, W. S., Cheng, A., & Xu, J. (2008). piezoelectric transducers using micromachined bulk piezo substrates. In 2008 IEEE Sensors, SENSORS 2008 (pp. 573-576). [4716504] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2008.4716504