piezoelectric transducers using micromachined bulk piezo substrates

Xiaoning Jiang, K. A. Snook, W. S. Hackenberger, A. Cheng, J. Xu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of > 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (> 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.

Original languageEnglish (US)
Title of host publication2008 IEEE Sensors, SENSORS 2008
Pages573-576
Number of pages4
DOIs
StatePublished - Dec 1 2008
Event2008 IEEE Sensors, SENSORS 2008 - Lecce, Italy
Duration: Oct 26 2008Oct 29 2008

Publication series

NameProceedings of IEEE Sensors

Other

Other2008 IEEE Sensors, SENSORS 2008
CountryItaly
CityLecce
Period10/26/0810/29/08

Fingerprint

Piezoelectric transducers
Transducers
Substrates
Composite materials
Ultrasonics
Electromechanical coupling
Process monitoring
Reactive ion etching
Aspect ratio
Etching
Single crystals
Bandwidth
Imaging techniques
Fabrication
Sensors
Experiments

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Jiang, X., Snook, K. A., Hackenberger, W. S., Cheng, A., & Xu, J. (2008). piezoelectric transducers using micromachined bulk piezo substrates. In 2008 IEEE Sensors, SENSORS 2008 (pp. 573-576). [4716504] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2008.4716504
Jiang, Xiaoning ; Snook, K. A. ; Hackenberger, W. S. ; Cheng, A. ; Xu, J. / piezoelectric transducers using micromachined bulk piezo substrates. 2008 IEEE Sensors, SENSORS 2008. 2008. pp. 573-576 (Proceedings of IEEE Sensors).
@inproceedings{982049a689724ddf80b7dd4474e1a7a8,
title = "piezoelectric transducers using micromachined bulk piezo substrates",
abstract = "for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of > 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90{\%} and the sensitivity was significantly improved (> 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.",
author = "Xiaoning Jiang and Snook, {K. A.} and Hackenberger, {W. S.} and A. Cheng and J. Xu",
year = "2008",
month = "12",
day = "1",
doi = "10.1109/ICSENS.2008.4716504",
language = "English (US)",
isbn = "9781424425808",
series = "Proceedings of IEEE Sensors",
pages = "573--576",
booktitle = "2008 IEEE Sensors, SENSORS 2008",

}

Jiang, X, Snook, KA, Hackenberger, WS, Cheng, A & Xu, J 2008, piezoelectric transducers using micromachined bulk piezo substrates. in 2008 IEEE Sensors, SENSORS 2008., 4716504, Proceedings of IEEE Sensors, pp. 573-576, 2008 IEEE Sensors, SENSORS 2008, Lecce, Italy, 10/26/08. https://doi.org/10.1109/ICSENS.2008.4716504

piezoelectric transducers using micromachined bulk piezo substrates. / Jiang, Xiaoning; Snook, K. A.; Hackenberger, W. S.; Cheng, A.; Xu, J.

2008 IEEE Sensors, SENSORS 2008. 2008. p. 573-576 4716504 (Proceedings of IEEE Sensors).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - piezoelectric transducers using micromachined bulk piezo substrates

AU - Jiang, Xiaoning

AU - Snook, K. A.

AU - Hackenberger, W. S.

AU - Cheng, A.

AU - Xu, J.

PY - 2008/12/1

Y1 - 2008/12/1

N2 - for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of > 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (> 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.

AB - for fabrication of high frequency, broadband piezoelectric composite transducers is reported in this paper. A deep reactive ion etching process was developed for bulk PMN-PT single crystal etching with an aspect ratio of > 8. A piezoelectric composite with a resonance of 75 MHz was fabricated and the electromechanical coupling coefficient was measured to be 0.67. A 75 MHz piezoelectric composite transducer was prototyped and pulse echo experiments showed that the transducer bandwidth is about 80 - 90% and the sensitivity was significantly improved (> 10 dB gain) relative to a commercial 75 MHz transducer. The developed HF piezoelectric composite transducers hold promise for medical ultrasound imaging, ultrasound NDE, and other novel sensors for biological, medical and industrial process monitoring.

UR - http://www.scopus.com/inward/record.url?scp=67649968631&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=67649968631&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2008.4716504

DO - 10.1109/ICSENS.2008.4716504

M3 - Conference contribution

AN - SCOPUS:67649968631

SN - 9781424425808

T3 - Proceedings of IEEE Sensors

SP - 573

EP - 576

BT - 2008 IEEE Sensors, SENSORS 2008

ER -

Jiang X, Snook KA, Hackenberger WS, Cheng A, Xu J. piezoelectric transducers using micromachined bulk piezo substrates. In 2008 IEEE Sensors, SENSORS 2008. 2008. p. 573-576. 4716504. (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2008.4716504