Piezoelectric ultrasonic micromotor with 1.5 mm diameter

Shuxiang Dong, Siak P. Lim, Kwork H. Lee, Jingdong Zhang, Leong C. Lim, Kenji Uchino

Research output: Contribution to journalArticle

95 Citations (Scopus)

Abstract

A piezoelectric ultrasonic micromotor has been developed using a lead zirconate titanate (PZT) ceramic/metal composite tube stator that was 1.5 mm in diameter and 7 mm in length. The micromotor was operated in its first bending vibration mode (∼70 kHz), producing speeds from hundreds to over 2000 rpm in both rotational directions. The maximum torque-output was 45 μNm, which is far superior to previous PZT thin film-based micromotors. This micromotor showed good reliability and stability for more than 300 hours of continued operation.

Original languageEnglish (US)
Pages (from-to)361-367
Number of pages7
JournalIEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volume50
Issue number4
DOIs
StatePublished - Apr 1 2003

Fingerprint

micromotors
Micromotors
ultrasonics
Ultrasonics
cermets
bending vibration
Cermets
stators
Stators
torque
vibration mode
Torque
Lead
tubes
Thin films
output
Composite materials
thin films

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

Cite this

Dong, Shuxiang ; Lim, Siak P. ; Lee, Kwork H. ; Zhang, Jingdong ; Lim, Leong C. ; Uchino, Kenji. / Piezoelectric ultrasonic micromotor with 1.5 mm diameter. In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2003 ; Vol. 50, No. 4. pp. 361-367.
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Piezoelectric ultrasonic micromotor with 1.5 mm diameter. / Dong, Shuxiang; Lim, Siak P.; Lee, Kwork H.; Zhang, Jingdong; Lim, Leong C.; Uchino, Kenji.

In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control, Vol. 50, No. 4, 01.04.2003, p. 361-367.

Research output: Contribution to journalArticle

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