Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems

S. Srinivasan, J. Hiller, Bernd C. Kabius, O. Auciello

Research output: Contribution to journalArticle

67 Citations (Scopus)

Abstract

Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(ZrxTi1-x)O 3 (PZT) films provide high sensitivity/low electrical noise for sensing/ high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This letter describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

Original languageEnglish (US)
Article number134101
JournalApplied Physics Letters
Volume90
Issue number13
DOIs
StatePublished - Apr 8 2007

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microelectromechanical systems
diamonds
diamond films
low voltage
platforms
mechanical properties
silicon
actuation
sensitivity

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

@article{38cdac6ed601479e9a89bc08639a2d62,
title = "Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems",
abstract = "Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD{\circledR}) in film form with 2-5 nm grains exhibits excellent properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(ZrxTi1-x)O 3 (PZT) films provide high sensitivity/low electrical noise for sensing/ high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This letter describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.",
author = "S. Srinivasan and J. Hiller and Kabius, {Bernd C.} and O. Auciello",
year = "2007",
month = "4",
day = "8",
doi = "10.1063/1.2679209",
language = "English (US)",
volume = "90",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "13",

}

Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems. / Srinivasan, S.; Hiller, J.; Kabius, Bernd C.; Auciello, O.

In: Applied Physics Letters, Vol. 90, No. 13, 134101, 08.04.2007.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Piezoelectric/ultrananocrystalline diamond heterostructures for high-performance multifunctional micro/nanoelectromechanical systems

AU - Srinivasan, S.

AU - Hiller, J.

AU - Kabius, Bernd C.

AU - Auciello, O.

PY - 2007/4/8

Y1 - 2007/4/8

N2 - Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(ZrxTi1-x)O 3 (PZT) films provide high sensitivity/low electrical noise for sensing/ high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This letter describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

AB - Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to some devices. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(ZrxTi1-x)O 3 (PZT) films provide high sensitivity/low electrical noise for sensing/ high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This letter describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

UR - http://www.scopus.com/inward/record.url?scp=34047127366&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34047127366&partnerID=8YFLogxK

U2 - 10.1063/1.2679209

DO - 10.1063/1.2679209

M3 - Article

VL - 90

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 13

M1 - 134101

ER -