Platinum black electroplated impedance particle sensor

Siyang Zheng, Mike Liu, Harvey L. Kasdan, Yu Chong Tai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We present a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media are in excellent agreement with model analysis. Signals from individual 10 μm polystyrene beads passing the sensing electrodes are successfully obtained.

Original languageEnglish (US)
Title of host publicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages87-91
Number of pages5
DOIs
StatePublished - Dec 1 2006
Event1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China
Duration: Jan 18 2006Jan 21 2006

Publication series

NameProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Other

Other1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
CountryChina
CityZhuhai
Period1/18/061/21/06

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Materials Science (miscellaneous)

Cite this

Zheng, S., Liu, M., Kasdan, H. L., & Tai, Y. C. (2006). Platinum black electroplated impedance particle sensor. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (pp. 87-91). [4134910] (Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS). https://doi.org/10.1109/NEMS.2006.334628