Polymeric micromechanical components with tunable stiffness

E. Manias, J. Chen, N. Fang, X. Zhang

Research output: Contribution to journalArticle

28 Scopus citations

Abstract

We present a microstereolithographic technique that enables the manufacturing of polymeric components for microelectromechanical systems. Model microstructures were fabricated in the form of end-supported microbeams (10 μm in diameter), in order to characterize the mechanical properties of the produced structures at the micron scale. The flexural modulus of these microbeams was measured by atomic force microscopy, using cantilevers with attached metal spheres, and employed in a three-point bending geometry. Postfabrication treatment of the microstructures allows for the tailoring of their stiffness.

Original languageEnglish (US)
Pages (from-to)1700-1702
Number of pages3
JournalApplied Physics Letters
Volume79
Issue number11
DOIs
StatePublished - Sep 10 2001

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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