Porosity of Low Dielectric Constant Materials

David W. Gidley, Hua Gen Peng, Richard Vallery, Christopher L. Soles, Hae Jeong Lee, Bryan D. Vogt, Eric K. Lin, Wen Li Wu, Mikhail R. Baklanov

Research output: Chapter in Book/Report/Conference proceedingChapter

9 Scopus citations
Original languageEnglish (US)
Title of host publicationDielectric Films for Advanced Microelectronics
Publisherwiley
Pages85-136
Number of pages52
ISBN (Electronic)9780470017944
ISBN (Print)0470013605, 9780470013601
DOIs
StatePublished - Mar 19 2007

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Materials Science(all)

Cite this

Gidley, D. W., Peng, H. G., Vallery, R., Soles, C. L., Lee, H. J., Vogt, B. D., Lin, E. K., Wu, W. L., & Baklanov, M. R. (2007). Porosity of Low Dielectric Constant Materials. In Dielectric Films for Advanced Microelectronics (pp. 85-136). wiley. https://doi.org/10.1002/9780470017944.ch3