Preferential sputtering of binary compounds: A model study

Barbara Jane Garrison

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

A model classical dynamics calculation has been performed to ascertain the effect of atomic mass and surface binding energy on preferential sputtering in binary systems. We find the mass effect not to have a simple dependence on the ratio of the masses of the two components. Rather, for two binary systems, both with a mass ratio of ~ 3, the ejection yield of the lighter component can vary from being the same as that of the heavier component to being 100% larger. Over a limited range of surface binding energies the ejection yield is inversely proportional to the binding energy. In addition, we suggest that the effective scattering sizes should be considered as a possible cause for preferential sputtering.

Original languageEnglish (US)
Pages (from-to)23-37
Number of pages15
JournalSurface Science
Volume114
Issue number1
DOIs
StatePublished - Jan 2 1982

Fingerprint

Binding energy
Sputtering
binding energy
sputtering
ejection
atomic weights
mass ratios
Scattering
causes
scattering

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Garrison, Barbara Jane. / Preferential sputtering of binary compounds : A model study. In: Surface Science. 1982 ; Vol. 114, No. 1. pp. 23-37.
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Preferential sputtering of binary compounds : A model study. / Garrison, Barbara Jane.

In: Surface Science, Vol. 114, No. 1, 02.01.1982, p. 23-37.

Research output: Contribution to journalArticle

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