Preferential sputtering of binary compounds: A model study

Barbara J. Garrison

Research output: Contribution to journalArticlepeer-review

26 Scopus citations


A model classical dynamics calculation has been performed to ascertain the effect of atomic mass and surface binding energy on preferential sputtering in binary systems. We find the mass effect not to have a simple dependence on the ratio of the masses of the two components. Rather, for two binary systems, both with a mass ratio of ~ 3, the ejection yield of the lighter component can vary from being the same as that of the heavier component to being 100% larger. Over a limited range of surface binding energies the ejection yield is inversely proportional to the binding energy. In addition, we suggest that the effective scattering sizes should be considered as a possible cause for preferential sputtering.

Original languageEnglish (US)
Pages (from-to)23-37
Number of pages15
JournalSurface Science
Issue number1
StatePublished - Jan 2 1982

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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