TY - JOUR
T1 - Preferential sputtering of binary compounds
T2 - A model study
AU - Garrison, Barbara J.
N1 - Funding Information:
Support is gratefully acknowledged from the National Science Foundation, the Office of Naval Research, and the Research Corporation. In addition, we thank the Camille and Henry Dreyfus Foundation for a grant for Newly Appointed Young Faculty and the Alfred P. Sloan Foundation for a Research Fellowship. We also thank R. Kelly, I.S.T. Tsong, P. Williams, N. Winograd and K. Foley for helpful discussions.
PY - 1982/1/2
Y1 - 1982/1/2
N2 - A model classical dynamics calculation has been performed to ascertain the effect of atomic mass and surface binding energy on preferential sputtering in binary systems. We find the mass effect not to have a simple dependence on the ratio of the masses of the two components. Rather, for two binary systems, both with a mass ratio of ~ 3, the ejection yield of the lighter component can vary from being the same as that of the heavier component to being 100% larger. Over a limited range of surface binding energies the ejection yield is inversely proportional to the binding energy. In addition, we suggest that the effective scattering sizes should be considered as a possible cause for preferential sputtering.
AB - A model classical dynamics calculation has been performed to ascertain the effect of atomic mass and surface binding energy on preferential sputtering in binary systems. We find the mass effect not to have a simple dependence on the ratio of the masses of the two components. Rather, for two binary systems, both with a mass ratio of ~ 3, the ejection yield of the lighter component can vary from being the same as that of the heavier component to being 100% larger. Over a limited range of surface binding energies the ejection yield is inversely proportional to the binding energy. In addition, we suggest that the effective scattering sizes should be considered as a possible cause for preferential sputtering.
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U2 - 10.1016/0039-6028(82)90453-8
DO - 10.1016/0039-6028(82)90453-8
M3 - Article
AN - SCOPUS:0002430413
SN - 0039-6028
VL - 114
SP - 23
EP - 37
JO - Surface Science
JF - Surface Science
IS - 1
ER -