Preparation and characterization of high-surface-area aluminum nitride thin films

S. A. Monie, C. G. Pantano

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Free-standing aluminum nitride (AlN) films were prepared by ammonia heat-treatment of pseudoboehmite [AlO(OH)] gels derived from an alumina sol. Supported films on sapphire substrates were also made by spin-coating the alumina sol, followed by ammonia nitridation. The conversion of the specimens to AlN as a function of heat-treatment temperature was studied using various characterization techniques. For the free-standing films, X-ray diffraction (XRD) showed that upon ammonia treatment, the specimens were first transformed from pseudoboehmite to η-alumina and finally to AlN above 1000 °C. 27Al magic-angle spinning nuclear magnetic resonance (MAS-NMR) spectroscopy confirmed the appearance of Al[N]4 coordination at 1000 °C, indicative of AlN. Complete conversion to AlN was achieved after 5 hour nitridation at 1200 °C. The 1200 °C heat-treated films consisted of crystallites of AlN in the size range 0.01-0.15 μm, with pores between 0.03-0.25 μm in diameter, as observed by TEM/electron diffraction analyses. These films had BET surface areas of approximately 25 m2/g. Nitridation of the supported films to AlN occurred at lower temperatures (approximately 900 °C), as shown by secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS).

Original languageEnglish (US)
Pages (from-to)53-58
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume454
StatePublished - 1997

Fingerprint

Aluminum nitride
aluminum nitrides
Aluminum Oxide
Thin films
preparation
thin films
Nitridation
Ammonia
ammonia
Alumina
aluminum oxides
Polymethyl Methacrylate
Sols
heat treatment
Heat treatment
Magic angle spinning
magnetic resonance spectroscopy
Spin coating
Secondary ion mass spectrometry
aluminum nitride

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

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title = "Preparation and characterization of high-surface-area aluminum nitride thin films",
abstract = "Free-standing aluminum nitride (AlN) films were prepared by ammonia heat-treatment of pseudoboehmite [AlO(OH)] gels derived from an alumina sol. Supported films on sapphire substrates were also made by spin-coating the alumina sol, followed by ammonia nitridation. The conversion of the specimens to AlN as a function of heat-treatment temperature was studied using various characterization techniques. For the free-standing films, X-ray diffraction (XRD) showed that upon ammonia treatment, the specimens were first transformed from pseudoboehmite to η-alumina and finally to AlN above 1000 °C. 27Al magic-angle spinning nuclear magnetic resonance (MAS-NMR) spectroscopy confirmed the appearance of Al[N]4 coordination at 1000 °C, indicative of AlN. Complete conversion to AlN was achieved after 5 hour nitridation at 1200 °C. The 1200 °C heat-treated films consisted of crystallites of AlN in the size range 0.01-0.15 μm, with pores between 0.03-0.25 μm in diameter, as observed by TEM/electron diffraction analyses. These films had BET surface areas of approximately 25 m2/g. Nitridation of the supported films to AlN occurred at lower temperatures (approximately 900 °C), as shown by secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS).",
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Preparation and characterization of high-surface-area aluminum nitride thin films. / Monie, S. A.; Pantano, C. G.

In: Materials Research Society Symposium - Proceedings, Vol. 454, 1997, p. 53-58.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Preparation and characterization of high-surface-area aluminum nitride thin films

AU - Monie, S. A.

AU - Pantano, C. G.

PY - 1997

Y1 - 1997

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AB - Free-standing aluminum nitride (AlN) films were prepared by ammonia heat-treatment of pseudoboehmite [AlO(OH)] gels derived from an alumina sol. Supported films on sapphire substrates were also made by spin-coating the alumina sol, followed by ammonia nitridation. The conversion of the specimens to AlN as a function of heat-treatment temperature was studied using various characterization techniques. For the free-standing films, X-ray diffraction (XRD) showed that upon ammonia treatment, the specimens were first transformed from pseudoboehmite to η-alumina and finally to AlN above 1000 °C. 27Al magic-angle spinning nuclear magnetic resonance (MAS-NMR) spectroscopy confirmed the appearance of Al[N]4 coordination at 1000 °C, indicative of AlN. Complete conversion to AlN was achieved after 5 hour nitridation at 1200 °C. The 1200 °C heat-treated films consisted of crystallites of AlN in the size range 0.01-0.15 μm, with pores between 0.03-0.25 μm in diameter, as observed by TEM/electron diffraction analyses. These films had BET surface areas of approximately 25 m2/g. Nitridation of the supported films to AlN occurred at lower temperatures (approximately 900 °C), as shown by secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS).

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