Preparation of lead zirconate titanate thin films by reactive magnetron co-sputtering

K. Yamakawa, S. Trolier-McKinstry, J. P. Dougherty

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13 Scopus citations

Abstract

A reactive magnetron co-sputtering method with multiple metal targets was used to prepare lead zirconate titanate films, with Zr/Ti ratios of 85/15, 52/48 and 30/70. The lead content was also varied. Films deposited on platinum coated silicon substrates followed by rapid thermal annealing crystallized in the perovskite structure at 600°C and showed (100) preferred orientation. The effects of Pb content in the films and Zr/Ti ratio on structural and electrical properties were investigated. Ti rich PZT films showed larger polarizations and higher coercive fields. Films which were nearly fatigue-free up to 10 [9] fatigue cycles have been prepared. Monitoring the operating voltage, current and power of the Pb target, and oxygen control during deposition were found to be important in the preparation of high quality PZT films.

Original languageEnglish (US)
Pages (from-to)317-322
Number of pages6
JournalMaterials Letters
Volume28
Issue number4-6
DOIs
StatePublished - Oct 1996

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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