Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices

M. T. Alam, M. A. Haque

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

While the current trend in nanoscale materials characterization is to investigate single domain (mechanical, electrical, thermal) properties, this study explore if the extremely small size also 'couples' these domains. However, even single domain studies are challenging at the nanoscale and the literature suggests the need for new multi-domain characterization techniques. In this paper, we present experimental design for performing nanoscale multi-physics characterizations. Demonstrative results on the role of mechanical strain on the thermal and electrical conductivity of metals, semiconductors and insulators are also presented.

Original languageEnglish (US)
Title of host publication2013 Transducers and Eurosensors XXVII
Subtitle of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
PublisherIEEE Computer Society
Pages780-783
Number of pages4
ISBN (Print)9781467359818
DOIs
Publication statusPublished - Jan 1 2013
Event2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain
Duration: Jun 16 2013Jun 20 2013

Publication series

Name2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Other

Other2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
CountrySpain
CityBarcelona
Period6/16/136/20/13

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All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Alam, M. T., & Haque, M. A. (2013). Probing mechanical, electrical and thermal properties of nanoscale materials using MEMS devices. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 780-783). [6626882] (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). IEEE Computer Society. https://doi.org/10.1109/Transducers.2013.6626882