In a typical semiconductor manufacturing process, within-run (or batch) variation is usually controlled by automatic controllers built into the equipment. Batch sizes may be as small as one wafer in some processes. A run-to-run (R2R) controller is necessary since specifications can change from batch to batch, the equipment may experience aging or wearing-out phenomena, maintenance operations can change the operating conditions of the process, or process disturbances may enter the system suddenly. This implies that equipment controllers cannot be kept operating at a fixed recipe. Thus, an R2R controller is needed to act as a supervisor, indicating whether a recipe change is needed and suggesting a new recipe for use in the next batch.
|Original language||English (US)|
|Title of host publication||Run-to-Run Control in Semiconductor Manufacturing|
|Number of pages||19|
|ISBN (Print)||0849311780, 9780849311789|
|Publication status||Published - Jan 1 2000|
All Science Journal Classification (ASJC) codes