Process integration of an interlevel dielectric (ILDO) module using a building-in reliability approach

Ronald E. Paulsen, Carl S. Kyono, Yun Wang, Kevin M. Klein, I. S. Lim, S. Tinkler, B. Bellamak, David W. Odle, Zhixu Zhou, P. Dahl, Mark Giovanetto, Jitendra Makwana, S. Patel, Chris Reno, Patrick M. Lenahan, Curt A. Billman

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Chemical Compounds

Engineering & Materials Science