Process monitoring and control of integrated-circuit manufacturing using Fourier transform infrared spectroscopy

Shaohua Liu, John R. Haigis, Marie B. DiTaranto, Karen Kinsella, James R. Markham, Qi Li, David B. Fenner, Peter R. Solomon, Stuart Farquharson, Philip W. Morrison

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A computer algorithm, which matches theoretical to measured infrared reflectance spectra, was successfully employed to determine multiple thin film properties of integrated circuits. Properties, such as film thickness, dielectric constant, and free carrier concentration were determined for a variety of important electronic films both in the laboratory and in process reactors. The latter measurements were accomplished by optically interfacing a Fourier transform infrared (FT-IR) spectrometer to several reactors. Real-time process monitoring allowed determination of deposition rate, free carrier activation temperature, and the influence of reactor conditions on film properties. Finally, these measurements were nondestructive, performed in-situ and within seconds, demonstrating the utility of this method for real-time process monitoring and control.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages171-182
Number of pages12
ISBN (Print)0819417130
StatePublished - Jan 1 1995
EventOptical Sensors for Environmental and Chemical Process Monitoring - McLean, VA, USA
Duration: Nov 9 1994Nov 10 1994

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2367
ISSN (Print)0277-786X

Other

OtherOptical Sensors for Environmental and Chemical Process Monitoring
CityMcLean, VA, USA
Period11/9/9411/10/94

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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