The operation of a run-to-run system usually takes places in two phases or stages. In the first stage, a new equipment is “qualified,” which means that experiments are conducted in order to find a recipe that optimizes the performance of the equipment. The qualification stage is based on design of experiments techniques and the use of a set of experimental optimization techniques called response surface methods.
|Original language||English (US)|
|Title of host publication||Run-to-Run Control in Semiconductor Manufacturing|
|Number of pages||10|
|ISBN (Print)||0849311780, 9780849311789|
|State||Published - Jan 1 2000|
All Science Journal Classification (ASJC) codes