Processing issues in pulse DC sputtering of vanadium oxide thin films for uncooled infrared detectors

S. S.N. Bharadwaja, C. Venkatasubramanyam, N. Fieldhouse, B. Gauntt, Myung Yoon Lee, S Ashok, E. C. Dickey, Thomas Nelson Jackson, M. Hom

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)
Original languageEnglish (US)
Title of host publicationAdvances in Electroceramic Materials II
Pages177-185
Number of pages9
StatePublished - Nov 15 2010
EventAdvances in Electroceramic Materials II - 2009 Material Science and Technology Conference, MS and T'09 - Pittsburgh, PA, United States
Duration: Oct 25 2009Oct 29 2009

Publication series

NameCeramic Transactions
Volume221
ISSN (Print)1042-1122

Other

OtherAdvances in Electroceramic Materials II - 2009 Material Science and Technology Conference, MS and T'09
CountryUnited States
CityPittsburgh, PA
Period10/25/0910/29/09

Fingerprint

Vanadium
Infrared detectors
Oxide films
Sputtering
Thin films
Processing

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

Cite this

Bharadwaja, S. S. N., Venkatasubramanyam, C., Fieldhouse, N., Gauntt, B., Lee, M. Y., Ashok, S., ... Hom, M. (2010). Processing issues in pulse DC sputtering of vanadium oxide thin films for uncooled infrared detectors. In Advances in Electroceramic Materials II (pp. 177-185). (Ceramic Transactions; Vol. 221).
Bharadwaja, S. S.N. ; Venkatasubramanyam, C. ; Fieldhouse, N. ; Gauntt, B. ; Lee, Myung Yoon ; Ashok, S ; Dickey, E. C. ; Jackson, Thomas Nelson ; Hom, M. / Processing issues in pulse DC sputtering of vanadium oxide thin films for uncooled infrared detectors. Advances in Electroceramic Materials II. 2010. pp. 177-185 (Ceramic Transactions).
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Bharadwaja, SSN, Venkatasubramanyam, C, Fieldhouse, N, Gauntt, B, Lee, MY, Ashok, S, Dickey, EC, Jackson, TN & Hom, M 2010, Processing issues in pulse DC sputtering of vanadium oxide thin films for uncooled infrared detectors. in Advances in Electroceramic Materials II. Ceramic Transactions, vol. 221, pp. 177-185, Advances in Electroceramic Materials II - 2009 Material Science and Technology Conference, MS and T'09, Pittsburgh, PA, United States, 10/25/09.

Processing issues in pulse DC sputtering of vanadium oxide thin films for uncooled infrared detectors. / Bharadwaja, S. S.N.; Venkatasubramanyam, C.; Fieldhouse, N.; Gauntt, B.; Lee, Myung Yoon; Ashok, S; Dickey, E. C.; Jackson, Thomas Nelson; Hom, M.

Advances in Electroceramic Materials II. 2010. p. 177-185 (Ceramic Transactions; Vol. 221).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Bharadwaja SSN, Venkatasubramanyam C, Fieldhouse N, Gauntt B, Lee MY, Ashok S et al. Processing issues in pulse DC sputtering of vanadium oxide thin films for uncooled infrared detectors. In Advances in Electroceramic Materials II. 2010. p. 177-185. (Ceramic Transactions).