Production and measurement of sputtered iridium

Phillip E. Savage, J. Mansfield

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)1222-1223
Number of pages2
JournalMicroscopy and Microanalysis
Volume14
Issue numberSUPPL. 2
DOIs
StatePublished - Aug 1 2008

All Science Journal Classification (ASJC) codes

  • Instrumentation

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