Properties of 6H-SiC crystals grown by hydrogen-assisted physical vapor transport

Q. Li, A. Y. Polyakov, M. Skowronski, Mark Andrew Fanton, R. C. Cavalero, R. G. Ray, B. E. Weiland

Research output: Contribution to journalArticle

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Abstract

Effects of hydrogen addition to the growth ambient during physical vapor transport (PVT) growth of 6H-SiC were investigated using secondary ion mass spectrometry, deep level transient spectroscopy, and Hall effect measurement. The background nitrogen concentration and the free electron density decrease with increasing hydrogen content. The formation of electron traps (activation energies of 0.4 eV, 0.6 eV, 0.7 eV, 0.9 eV, and 1 eV) was also strongly suppressed. The above results are interpreted as a consequence of hydrocarbon formation produced by the reaction of hydrogen with the SiC source and the graphite parts of the furnace. This leads to more congruent evaporation of SiC and the shift of the gas phase and the SiC deposit stoichiometry due to less Si-rich conditions than in standard PVT growth.

Original languageEnglish (US)
Article number202102
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume86
Issue number20
DOIs
StatePublished - May 16 2005

Fingerprint

vapors
hydrogen
crystals
secondary ion mass spectrometry
free electrons
furnaces
Hall effect
stoichiometry
graphite
hydrocarbons
deposits
evaporation
traps
vapor phases
activation energy
nitrogen
shift
spectroscopy
electrons

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Li, Q., Polyakov, A. Y., Skowronski, M., Fanton, M. A., Cavalero, R. C., Ray, R. G., & Weiland, B. E. (2005). Properties of 6H-SiC crystals grown by hydrogen-assisted physical vapor transport. Applied Physics Letters, 86(20), 1-3. [202102]. https://doi.org/10.1063/1.1923181
Li, Q. ; Polyakov, A. Y. ; Skowronski, M. ; Fanton, Mark Andrew ; Cavalero, R. C. ; Ray, R. G. ; Weiland, B. E. / Properties of 6H-SiC crystals grown by hydrogen-assisted physical vapor transport. In: Applied Physics Letters. 2005 ; Vol. 86, No. 20. pp. 1-3.
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Li, Q, Polyakov, AY, Skowronski, M, Fanton, MA, Cavalero, RC, Ray, RG & Weiland, BE 2005, 'Properties of 6H-SiC crystals grown by hydrogen-assisted physical vapor transport', Applied Physics Letters, vol. 86, no. 20, 202102, pp. 1-3. https://doi.org/10.1063/1.1923181

Properties of 6H-SiC crystals grown by hydrogen-assisted physical vapor transport. / Li, Q.; Polyakov, A. Y.; Skowronski, M.; Fanton, Mark Andrew; Cavalero, R. C.; Ray, R. G.; Weiland, B. E.

In: Applied Physics Letters, Vol. 86, No. 20, 202102, 16.05.2005, p. 1-3.

Research output: Contribution to journalArticle

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AU - Li, Q.

AU - Polyakov, A. Y.

AU - Skowronski, M.

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AU - Cavalero, R. C.

AU - Ray, R. G.

AU - Weiland, B. E.

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AB - Effects of hydrogen addition to the growth ambient during physical vapor transport (PVT) growth of 6H-SiC were investigated using secondary ion mass spectrometry, deep level transient spectroscopy, and Hall effect measurement. The background nitrogen concentration and the free electron density decrease with increasing hydrogen content. The formation of electron traps (activation energies of 0.4 eV, 0.6 eV, 0.7 eV, 0.9 eV, and 1 eV) was also strongly suppressed. The above results are interpreted as a consequence of hydrocarbon formation produced by the reaction of hydrogen with the SiC source and the graphite parts of the furnace. This leads to more congruent evaporation of SiC and the shift of the gas phase and the SiC deposit stoichiometry due to less Si-rich conditions than in standard PVT growth.

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