Prospects for imaging with TOF-SIMS using gold liquid metal ion sources

Amy V. Walker, Nicholas Winograd

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

Gold liquid metal ion sources produce high quality TOF-SIMS spectra with excellent prospects for imaging using either Au ++ , Au + or Au 2 + primary ions. The beam is stable and exhibits a long lifetime when employing eutectic alloys of Si or Ge. In general, the yields are found to be considerably higher than when using Ga beams, but the increased yield associated with using dimer ions is also associated with an increase in surface damage. Finally, it appears that Au ++ ion bombardment may yield improved spectra for certain types of compounds.

Original languageEnglish (US)
Pages (from-to)198-200
Number of pages3
JournalApplied Surface Science
Volume203-204
DOIs
StatePublished - Jan 15 2003

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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