In this paper, we introduce a modified serial bideposition (SBD) method, asymmetric SBD, for depositing sculptured thin films (STFs) which may allow added control of the surface area, void accessibility, and optical properties of STFs. Results on using Ti O2 STFs with spectral-hole filters as vapor/liquid sensors are presented. In addition, solar cell, microcavity, biological sensing, and bioabsorption devices utilizing STFs are discussed.
|Original language||English (US)|
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - 2007|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering