Prospects for nanowire sculptured-thin-film devices

Sean M. Pursel, Mark W. Horn

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

In this paper, we introduce a modified serial bideposition (SBD) method, asymmetric SBD, for depositing sculptured thin films (STFs) which may allow added control of the surface area, void accessibility, and optical properties of STFs. Results on using Ti O2 STFs with spectral-hole filters as vapor/liquid sensors are presented. In addition, solar cell, microcavity, biological sensing, and bioabsorption devices utilizing STFs are discussed.

Original languageEnglish (US)
Pages (from-to)2611-2615
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume25
Issue number6
DOIs
StatePublished - Dec 20 2007

Fingerprint

Thin film devices
Nanowires
nanowires
Thin films
thin films
Microcavities
voids
Solar cells
Optical properties
solar cells
Vapors
vapors
filters
optical properties
sensors
Sensors
Liquids
liquids

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

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Prospects for nanowire sculptured-thin-film devices. / Pursel, Sean M.; Horn, Mark W.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 25, No. 6, 20.12.2007, p. 2611-2615.

Research output: Contribution to journalArticle

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