Prospects for nanowire sculptured-thin-film devices

Sean M. Pursel, Mark W. Horn

Research output: Contribution to journalArticlepeer-review

31 Scopus citations

Abstract

In this paper, we introduce a modified serial bideposition (SBD) method, asymmetric SBD, for depositing sculptured thin films (STFs) which may allow added control of the surface area, void accessibility, and optical properties of STFs. Results on using Ti O2 STFs with spectral-hole filters as vapor/liquid sensors are presented. In addition, solar cell, microcavity, biological sensing, and bioabsorption devices utilizing STFs are discussed.

Original languageEnglish (US)
Pages (from-to)2611-2615
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume25
Issue number6
DOIs
StatePublished - Dec 20 2007

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Prospects for nanowire sculptured-thin-film devices'. Together they form a unique fingerprint.

Cite this