Quantitative electrically detected magnetic resonance for device reliability studies

Corey J. Cochrane, Mark Anders, Mike Mutch, Patrick Lenahan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Electrically detected magnetic resonance (EDMR) is a valuable tool for studying a variety of reliability problems, including the negative-bias temperature instability, total ionizing dose radiation damage, and instability in high-K gate stack-based MOS devices. Although conventional high-field EDMR can provide identification of the physical and chemical nature of electrically active reliability dominating defects in microelectronic devices, all of the EDMR studies to date have been limited by one significant shortcoming: EDMR is not quantitative. Although a large EDMR response generally corresponds to a high defect density and a small EDMR response corresponds to a low one, it has not been possible to assign actual numbers to the defect densities detected via EDMR. We've solved this problem.

Original languageEnglish (US)
Title of host publication2014 IEEE International Integrated Reliability Workshop Final Report, IIRW 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages6-9
Number of pages4
ISBN (Electronic)9781479973088
DOIs
Publication statusPublished - Jan 1 2014
Event2014 IEEE International Integrated Reliability Workshop Final Report, IIRW 2014 - South Lake Tahoe, United States
Duration: Oct 12 2014Oct 16 2014

Publication series

NameIEEE International Integrated Reliability Workshop Final Report
Volume2015-February

Other

Other2014 IEEE International Integrated Reliability Workshop Final Report, IIRW 2014
CountryUnited States
CitySouth Lake Tahoe
Period10/12/1410/16/14

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials

Cite this

Cochrane, C. J., Anders, M., Mutch, M., & Lenahan, P. (2014). Quantitative electrically detected magnetic resonance for device reliability studies. In 2014 IEEE International Integrated Reliability Workshop Final Report, IIRW 2014 (pp. 6-9). [7049495] (IEEE International Integrated Reliability Workshop Final Report; Vol. 2015-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IIRW.2014.7049495