Radiation induced leakage currents in dense and porous low-k dielectrics

Ryan J. Waskiewicz, Michael J. Mutch, Patrick M. Lenahan, Sean W. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

We investigate leakage currents in a-SiOC:H thin films with electrically detected magnetic resonance (EDMR) and new zero field magnetoresistance measurements. We substantially change leakage currents by subjecting the dielectrics to 60Co gamma irradiation. Our results strongly suggest the potential of a very simple measurement, near zero field magnetoresistance, as a reliability physics tool in the investigation of transport mechanisms in these materials.

Original languageEnglish (US)
Title of host publicationProceedings of the 2016 IEEE International Integrated Reliability Workshop, IIRW 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages99-102
Number of pages4
ISBN (Electronic)9781509041923
DOIs
StatePublished - Apr 19 2017
Event2016 IEEE International Integrated Reliability Workshop, IIRW 2016 - S. Lake Tahoe, United States
Duration: Oct 9 2016Oct 13 2016

Publication series

NameProceedings of the 2016 IEEE International Integrated Reliability Workshop, IIRW 2016

Other

Other2016 IEEE International Integrated Reliability Workshop, IIRW 2016
CountryUnited States
CityS. Lake Tahoe
Period10/9/1610/13/16

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality

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