Real-time spectroscopic ellipsometry as a characterization tool for oxide molecular beam epitaxy

B. J. Gibbons, M. E. Hawley, S. Trolier-McKinstry, D. G. Schlom

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Abstract

A real-time spectroscopic ellipsometer (RTSE) is integrated as a complementary tool for an oxide molecular beam epitaxy (MBE) system. The RTSE is used to characterize the deposition of (111)-oriented Y2O3 on (110)-oriented Si to quantify how the RTSE complemented the other tools in the MBE.

Original languageEnglish (US)
Pages (from-to)584-590
Number of pages7
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume19
Issue number2
DOIs
StatePublished - Mar 1 2001

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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