Realization of nanoscale resolution with a micromachined thermally actuated testing stage

Shaoning Lu, Dmitriy A. Dikin, Sulin Zhang, Frank T. Fisher, Junghoon Lee, Rodney S. Ruoff

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Abstract

The fabrication, design and characterization of microelectromechanical systems (MEMS) stress-strain device for testing the mechanical properties of nanomaterials were discussed. The study was carried out by using thermal actuation, with integrated motion amplification structures. It was found that the temperature rise necessary to actuate was minimized through use of a V-beam amplification structure. It was also observed that the design approach and methodology were used to produce a variety of stages for different ranges of input force and displacement resolution.

Original languageEnglish (US)
Pages (from-to)2154-2162
Number of pages9
JournalReview of Scientific Instruments
Volume75
Issue number6
DOIs
StatePublished - Jun 1 2004

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All Science Journal Classification (ASJC) codes

  • Instrumentation

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