Recent advances in piezoelectric materials

T. R. Shrout, S. E. Park, C. A. Randall, J. P. Shepard, L. B. Hackenberger, D. Pickrell, W. S. Hackenberger

Research output: Contribution to journalConference article

5 Scopus citations

Abstract

Recent developments in piezoelectric materials include submicron grain size ceramics and single crystals. Pb(Zr,Ti)O3 (PZT) ceramics with submicron grain sizes (~ 0.5 μm) have been produced with properties comparable to conventional, coarse grained (~ 3 to 5 μm) ceramics. The fine grain ceramics exhibit improved machinability over conventional materials. Ultrasonic transducer arrays with post widths less than 15 μm have been fabricated as well as thin plates with thicknesses as low as 10 μm. The yields and performance of such operations are expected to be much greater with fine grain ceramic than with conventional material. The single crystal piezoelectrics developed offer field induced strain an order of magnitude higher than what can be achieved in piezoelectric ceramic actuators (> 1%). Furthermore, the strain electric field hysteresis and dielectric losses are very low for these materials and electromechanical coupling factors (k33) are greater than 90%. Applications which may benefit from the recent developments include smart materials and structures and MEMS.

Original languageEnglish (US)
Pages (from-to)56-67
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3241
DOIs
Publication statusPublished - Dec 1 1997
EventSmart Materials, Structures, and Integrated Systems - Adelaide, SA, Australia
Duration: Dec 10 1997Dec 10 1997

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Shrout, T. R., Park, S. E., Randall, C. A., Shepard, J. P., Hackenberger, L. B., Pickrell, D., & Hackenberger, W. S. (1997). Recent advances in piezoelectric materials. Proceedings of SPIE - The International Society for Optical Engineering, 3241, 56-67. https://doi.org/10.1117/12.293509